{"id":"W1971515011","doi":"10.1116/1.1507342","title":"Investigation of thermal flux to the substrate during sputter deposition of aluminum","year":2002,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":34,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Cavity magnetron; Sputter deposition; Materials science; Substrate (aquarium); Analytical Chemistry (journal); Atomic physics; Sputtering; Chemistry; Thin film; Nanotechnology; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002195291,0.000283767,0.0004460625,0.0001917163,0.0003564444,0.0003530419,0.0002738961,0.0002734991,0.001231591],"category_scores_gemma":[0.0006340581,0.0002478645,0.0001632259,0.0002073421,0.0002476856,0.0003454033,0.0001324646,0.0003448818,0.0002421137],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003682979,"about_ca_system_score_gemma":0.0001806923,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007445308,"about_ca_topic_score_gemma":0.0008496892,"domain_scores_codex":[0.9998459,0.00001537788,0.000005315539,0.00004222291,0.0000573403,0.00003379753],"domain_scores_gemma":[0.9996358,0.0001644707,0.00004133309,0.0000322576,0.0001027065,0.00002332544],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002095244,0.00001445699,0.00108221,0.00006066321,0.000008763501,0.0001684151,0.0001651805,0.0001666269,0.9951817,0.00006037129,0.00006101947,0.002821051],"study_design_scores_gemma":[0.000008898952,0.0002611088,0.01403909,0.000006909709,0.00001280105,0.0001770182,0.0001182521,0.001891053,0.9825686,0.00002145197,0.0008874438,0.000007332969],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9961371,0.0004136588,0.002345042,0.00003031418,0.00001381722,0.00001129916,0.00008200533,0.00007061513,0.0008961377],"genre_scores_gemma":[0.9971974,0.0001992582,0.001149285,0.00001845637,0.000007187684,0.00001428993,0.0001271525,0.00004717556,0.001239744],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001231591,"threshold_uncertainty_score":0.004120052,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01341286162121937,"score_gpt":0.1938621148840439,"score_spread":0.1804492532628245,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}