{"id":"W1972331594","doi":"10.1364/ao.42.004037","title":"Ion-beam etching for the precise manufacture of optical coatings","year":2003,"lang":"en","type":"article","venue":"Applied Optics","topic":"Optical Coatings and Gratings","field":"Materials Science","cited_by":13,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institute for Microstructural Sciences","funders":"","keywords":"Materials science; Etching (microfabrication); Sputtering; Ion beam; Deposition (geology); Optics; Fabrication; Focused ion beam; Ion beam-assisted deposition; Thin film; Optoelectronics; Beam (structure); Optical coating; Layer (electronics); Sputter deposition; Ion beam deposition; Physical vapor deposition; Ion; Nanotechnology; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0007651251,0.000166536,0.0002410392,0.00002072507,0.0002444285,0.0000993444,0.0002909043,0.0001097199,0.00009750984],"category_scores_gemma":[0.0005850269,0.0001086742,0.00007927589,0.00009804706,0.0001698064,0.00005635963,0.00006485771,0.0001682803,0.00003298279],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001619665,"about_ca_system_score_gemma":0.00004254096,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00000448337,"about_ca_topic_score_gemma":0.000002485765,"domain_scores_codex":[0.9987137,0.0000141942,0.0003806142,0.0002653503,0.0002834465,0.0003426684],"domain_scores_gemma":[0.9980929,0.001231615,0.0001757591,0.0003174244,0.0001015487,0.00008068178],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003116432,0.00005547454,0.00001659207,0.00005525199,0.000006509472,3.516541e-7,0.0004582596,0.001036041,0.6397282,0.3571369,0.0003976763,0.001077514],"study_design_scores_gemma":[0.0004270112,0.00009364172,0.00005019746,0.0000194937,0.00005707813,0.000003484621,0.0005406803,0.0006573074,0.9822159,0.01273558,0.003015073,0.0001845124],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9360117,0.00006058949,0.04004886,0.0003737847,0.000309744,0.0009259768,0.00002402803,0.00007067105,0.02217466],"genre_scores_gemma":[0.9061719,0.000005322356,0.09322436,0.0002503763,0.00008501689,0.00007126225,0.000003220045,0.00002345173,0.0001650536],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.3444014,"threshold_uncertainty_score":0.4431605,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01406356806784731,"score_gpt":0.2464636891972983,"score_spread":0.232400121129451,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}