{"id":"W1972606339","doi":"10.14356/kona.2003020","title":"Slurry Design for Chemical Mechanical Polishing","year":2003,"lang":"en","type":"article","venue":"KONA Powder and Particle Journal","topic":"Advanced Surface Polishing Techniques","field":"Engineering","cited_by":14,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institute of Particle Physics","funders":"University of Florida; National Science Foundation","keywords":"Chemical-mechanical planarization; Slurry; Materials science; Polishing; Wafer; Abrasive; Microelectronics; Particle (ecology); Abrasive machining; Substrate (aquarium); Dissolution; Composite material; Nanotechnology; Chemical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004653692,0.000660904,0.0007393348,0.0004746925,0.0002951844,0.001099137,0.001146625,0.001118814,0.003059634],"category_scores_gemma":[0.0009566288,0.0003709209,0.0004124691,0.0004722303,0.0002663115,0.0007830958,0.0004836909,0.000548463,0.00274446],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004922002,"about_ca_system_score_gemma":0.000339133,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000337,"about_ca_topic_score_gemma":0.0005338885,"domain_scores_codex":[0.99937,0.0000638465,0.00005593535,0.0001478024,0.0002966391,0.00006572178],"domain_scores_gemma":[0.9996328,0.00005590845,0.00007535756,0.00004270948,0.0001719876,0.0000212356],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002058228,0.0001032913,0.0003938755,0.0006373677,0.00002348281,0.0001209072,0.00004256143,0.003150992,0.9248885,0.003689737,0.001299997,0.06544353],"study_design_scores_gemma":[0.0001292927,0.001219229,0.001005721,0.00003808504,0.00008784804,0.0005041601,0.00004375,0.04429275,0.8956857,0.001520566,0.05544353,0.00002933227],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.1446682,0.005918577,0.8100657,0.0005355338,0.0008901765,0.0007705048,0.0004450741,0.002489788,0.03421646],"genre_scores_gemma":[0.7100359,0.002200912,0.271447,0.0003373776,0.0001428277,0.0006323925,0.0007125772,0.0003279586,0.01416303],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.003059634,"threshold_uncertainty_score":0.01023549,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03212922931777092,"score_gpt":0.2660283382579444,"score_spread":0.2338991089401735,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}