{"id":"W1972606339","doi":"10.14356/kona.2003020","title":"Slurry Design for Chemical Mechanical Polishing","year":2003,"lang":"en","type":"article","venue":"KONA Powder and Particle Journal","topic":"Advanced Surface Polishing Techniques","field":"Engineering","cited_by":14,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institute of Particle Physics","funders":"University of Florida; National Science Foundation","keywords":"Chemical-mechanical planarization; Slurry; Materials science; Polishing; Wafer; Abrasive; Microelectronics; Particle (ecology); Abrasive machining; Substrate (aquarium); Dissolution; Composite material; Nanotechnology; Chemical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004719144,0.0001188098,0.0001425792,0.00002323033,0.0001225798,0.00012521,0.00008946632,0.00007811411,0.00002744054],"category_scores_gemma":[0.0002422358,0.0001117584,0.00005172345,0.00006508161,0.000020855,0.0003266194,0.00001278348,0.0002617468,0.000003024204],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004437233,"about_ca_system_score_gemma":0.0000173849,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":9.103508e-7,"about_ca_topic_score_gemma":4.357205e-7,"domain_scores_codex":[0.9991708,0.00004306243,0.0002086089,0.0001048237,0.0001117585,0.0003609097],"domain_scores_gemma":[0.9994702,0.0001702897,0.00002453311,0.00009473594,0.00003691517,0.0002032853],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008997779,0.00009358885,0.0008344071,0.00007669676,0.00013581,0.00002976335,0.001689459,0.007134531,0.9108402,0.04486331,0.02462258,0.009589734],"study_design_scores_gemma":[0.0007510632,0.00007114081,0.00006060095,0.00003495692,0.00003124487,0.0003136356,0.0001174127,0.03002497,0.8757581,0.0855736,0.006951662,0.0003116907],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.4193839,0.000728027,0.5786846,0.0002485215,0.0002538293,0.000143681,0.000003605972,0.0002695014,0.0002843405],"genre_scores_gemma":[0.8975422,0.00005938036,0.1021303,0.0001081213,0.0001009,0.00001136403,3.732312e-7,0.0000312931,0.00001613021],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.4781583,"threshold_uncertainty_score":0.4557376,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03212922931777092,"score_gpt":0.2660283382579444,"score_spread":0.2338991089401735,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}