{"id":"W1972634575","doi":"10.1117/12.2040728","title":"A bi-material microbeam based thermal actuator for out-of-plane rotation","year":2014,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Microbeam; Rotation (mathematics); Actuator; Materials science; Thermal; Beam (structure); Optics; Plane (geometry); Finite element method; Optoelectronics; Physics; Geometry; Electrical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001372487,0.0005016627,0.0003353966,0.000251471,0.0003261204,0.000315027,0.0006081188,0.0005440053,0.0007379351],"category_scores_gemma":[0.00018747,0.0002930852,0.000175638,0.0001606273,0.0002572918,0.0004173287,0.0002816479,0.0004764432,0.0006309171],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003663593,"about_ca_system_score_gemma":0.0002963072,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000450213,"about_ca_topic_score_gemma":0.001281648,"domain_scores_codex":[0.9997994,0.00001648279,0.000009361709,0.00004244266,0.0001053493,0.00002682882],"domain_scores_gemma":[0.9998522,0.00002373149,0.0000431187,0.00001616907,0.00004082992,0.00002386153],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001748657,0.000007640277,0.0000417109,0.00004489288,0.000002637495,0.00002048063,0.00001086741,0.00009011848,0.9972602,0.0001847793,0.0001040208,0.002215152],"study_design_scores_gemma":[0.000009903025,0.000179384,0.0008668881,0.000004947191,0.00001021511,0.000241652,0.00001360661,0.005197114,0.9861742,0.00003551056,0.007249075,0.00001749232],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7032164,0.006565123,0.2704466,0.0006804262,0.0009896938,0.0003473819,0.000472007,0.001667182,0.0156151],"genre_scores_gemma":[0.7734041,0.001235591,0.2112151,0.0002353364,0.0001154635,0.0002476656,0.0002592013,0.00007345102,0.01321425],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0007379351,"threshold_uncertainty_score":0.002658129,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008794502522746266,"score_gpt":0.2210305620283891,"score_spread":0.2122360595056428,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}