{"id":"W1972689021","doi":"10.1016/s0254-0584(03)00228-1","title":"Two-step epitaxial lateral overgrowth of GaN","year":2003,"lang":"en","type":"article","venue":"Materials Chemistry and Physics","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":10,"is_retracted":false,"has_abstract":false,"ca_institutions":"National Research Council Canada; Institute for Microstructural Sciences","funders":"National Science Council","keywords":"Epitaxy; Materials science; Etch pit density; Basal plane; Surface finish; Root mean square; Optoelectronics; Two step; Surface roughness; Layer (electronics); Morphology (biology); Optics; Etching (microfabrication); Crystallography; Composite material; Chemistry; Geology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000088402,0.0002386395,0.0002354146,0.000110233,0.0001466161,0.0003054473,0.0003376487,0.0002235999,0.0005992913],"category_scores_gemma":[0.0001356391,0.0001946674,0.0001466498,0.0001122115,0.00012847,0.0002170944,0.0003285304,0.0003054316,0.0002237161],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003082675,"about_ca_system_score_gemma":0.0002158547,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001126528,"about_ca_topic_score_gemma":0.003423714,"domain_scores_codex":[0.9998996,0.000006256671,0.000004849391,0.00001783026,0.00003908991,0.00003232269],"domain_scores_gemma":[0.9999217,0.00001117296,0.00001935828,0.00002219253,0.00001317802,0.0000123701],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005379966,0.00001581935,0.0002000677,0.00005164348,0.000005840401,0.00005153878,0.00001662955,0.0002413659,0.9975908,0.0002359697,0.0001191395,0.001417496],"study_design_scores_gemma":[0.00002246292,0.0001095268,0.002311994,0.000003998593,0.00000761869,0.0001043765,0.00002430628,0.004203636,0.9911108,0.00006966063,0.002021215,0.0000105126],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9933156,0.0004001897,0.001879649,0.00006240029,0.00008470607,0.00001979561,0.0002187401,0.0001046236,0.003914388],"genre_scores_gemma":[0.9928878,0.000226126,0.003161899,0.00002964423,0.0000120001,0.00001578738,0.0002127,0.00002359399,0.003430462],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001126528,"threshold_uncertainty_score":0.002239943,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008199673279724528,"score_gpt":0.2231639211616892,"score_spread":0.2149642478819647,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}