{"id":"W1973566387","doi":"10.1149/2.jes113470","title":"A Study of the Colloidal Stability of Mixed Abrasive Slurries and Their Role in CMP","year":2012,"lang":"en","type":"article","venue":"Journal of The Electrochemical Society","topic":"Advanced Surface Polishing Techniques","field":"Engineering","cited_by":23,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada; AkzoNobel","keywords":"Chemical-mechanical planarization; Slurry; Settling; Materials science; Abrasive; Composite number; Polishing; Oxide; Silicon; Particle (ecology); Chemical engineering; Colloidal silica; Silicon oxide; Colloid; Composite material; Nanoparticle; Nanotechnology; Metallurgy; Coating; Thermodynamics; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003844689,0.0002232215,0.0002475322,0.0002581267,0.0002175811,0.0003421823,0.0002623956,0.0003612558,0.0005187112],"category_scores_gemma":[0.001003127,0.0001523216,0.0002260263,0.0001706806,0.0002265218,0.0004027865,0.0001661017,0.0005243054,0.0001736251],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002130098,"about_ca_system_score_gemma":0.0001990481,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000747874,"about_ca_topic_score_gemma":0.0007984271,"domain_scores_codex":[0.9997869,0.00002589852,0.00001334579,0.00005967153,0.00009105853,0.00002310093],"domain_scores_gemma":[0.9995371,0.0002094821,0.00006964981,0.00002882243,0.0001205468,0.0000342704],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003350514,0.00001617873,0.0002552407,0.00004255781,0.000005864624,0.00005207632,0.00002946628,0.0001861971,0.9976249,0.0001054787,0.00001340442,0.001635056],"study_design_scores_gemma":[0.000008603065,0.0003484327,0.002590487,0.000005053046,0.00001275245,0.0001109607,0.00003261806,0.004907852,0.9911655,0.00006865228,0.0007426735,0.000006380184],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9876557,0.001501977,0.009664313,0.00004663175,0.00002205847,0.00002701233,0.00005755748,0.00002968615,0.0009951688],"genre_scores_gemma":[0.9912474,0.0004534179,0.007158387,0.00001646295,0.000006946068,0.00001619791,0.00006437717,0.00001379576,0.001023079],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.000747874,"threshold_uncertainty_score":0.002033293,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007722936875055824,"score_gpt":0.2253192925934954,"score_spread":0.2175963557184396,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}