{"id":"W1973566387","doi":"10.1149/2.jes113470","title":"A Study of the Colloidal Stability of Mixed Abrasive Slurries and Their Role in CMP","year":2012,"lang":"en","type":"article","venue":"Journal of The Electrochemical Society","topic":"Advanced Surface Polishing Techniques","field":"Engineering","cited_by":23,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada; AkzoNobel","keywords":"Chemical-mechanical planarization; Slurry; Settling; Materials science; Abrasive; Composite number; Polishing; Oxide; Silicon; Particle (ecology); Chemical engineering; Colloidal silica; Silicon oxide; Colloid; Composite material; Nanoparticle; Nanotechnology; Metallurgy; Coating; Thermodynamics; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000465994,0.0001039096,0.0002660532,0.000009776586,0.00003088314,0.000005310333,0.0003116687,0.00007418764,0.00000190389],"category_scores_gemma":[0.0001982569,0.00005698645,0.0001703141,0.000197439,0.0001070617,0.0001317952,0.0001109769,0.0005066715,1.781098e-8],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001428491,"about_ca_system_score_gemma":0.00002559434,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000009166964,"about_ca_topic_score_gemma":0.00001777206,"domain_scores_codex":[0.9991611,0.00007184341,0.0003387366,0.00005091175,0.0001807891,0.0001966173],"domain_scores_gemma":[0.9993383,0.0001807879,0.0001920763,0.0001778811,0.00007257862,0.00003832057],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001837402,0.0001472366,0.07582684,0.00002489738,0.00006715788,2.331422e-8,0.008448509,0.00003216881,0.9152734,0.00001446672,0.00009868764,0.00004820946],"study_design_scores_gemma":[0.000266253,0.00005811226,0.02217523,0.00003084798,0.00001882035,0.00000647504,0.003336101,0.00008606951,0.9725791,0.001357818,0.00002964535,0.00005552186],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9983262,0.0007749495,0.000559909,0.00008310406,0.00005517909,0.0001625173,0.00000283436,0.00001296383,0.00002237507],"genre_scores_gemma":[0.9982974,0.00003689597,0.001604673,0.00001216823,0.00003297133,0.000002987371,5.845511e-8,0.00001135174,0.000001523664],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.05730568,"threshold_uncertainty_score":0.232384,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007722936875055824,"score_gpt":0.2253192925934954,"score_spread":0.2175963557184396,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}