{"id":"W1974267558","doi":"10.1063/1.4884438","title":"Channel cracks in atomic-layer and molecular-layer deposited multilayer thin film coatings","year":2014,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":15,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Materials science; Composite material; Oxide; Atomic layer deposition; Layer (electronics); Thin film; Fracture mechanics; Coating; Ultimate tensile strength; Composite number; Strain energy; Permeation; Nanotechnology; Metallurgy; Finite element method; Structural engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001126104,0.0001391838,0.0001720931,0.0002256938,0.0001677727,0.0002828826,0.0002412721,0.0005570899,0.0004444395],"category_scores_gemma":[0.0004426565,0.0002634542,0.0001909917,0.00009775202,0.0002753187,0.0002931573,0.0002233557,0.0002693669,0.00005105739],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004213158,"about_ca_system_score_gemma":0.0002621181,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001724865,"about_ca_topic_score_gemma":0.002554918,"domain_scores_codex":[0.9999106,0.000005815505,0.0000039895,0.00001613729,0.00004110419,0.00002242405],"domain_scores_gemma":[0.9998505,0.00006132561,0.00003816537,0.0000140351,0.00002232802,0.00001362463],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001514963,0.00008667485,0.00389224,0.0001715874,0.00003467482,0.0003071848,0.0001352527,0.1783486,0.798366,0.004708759,0.0001699632,0.01362765],"study_design_scores_gemma":[0.00005366393,0.0002501759,0.008265353,0.00002746263,0.00002408658,0.0001715038,0.00005593588,0.8117795,0.1770666,0.001314449,0.0009589384,0.00003240944],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9840783,0.0003958512,0.01446783,0.0000300215,0.00001012677,0.00001387801,0.00003860598,0.00005210668,0.0009132379],"genre_scores_gemma":[0.9936529,0.0001693421,0.00557999,0.000007057738,0.000002094868,0.00001159437,0.00002055852,0.00001300913,0.000543326],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001724865,"threshold_uncertainty_score":0.003429592,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01093443159080582,"score_gpt":0.2187073037920318,"score_spread":0.207772872201226,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}