{"id":"W1975129698","doi":"10.1116/1.1705640","title":"Measurement of energy flux at the substrate in a magnetron sputter system using an integrated sensor","year":2004,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Acoustic Wave Resonator Technologies","field":"Engineering","cited_by":14,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Materials science; High-power impulse magnetron sputtering; Cavity magnetron; Thermocouple; Sputter deposition; Substrate (aquarium); Torr; Deposition (geology); Pressure sensor; Ohmic contact; Sputtering; Energy flux; Thin film; Optoelectronics; Analytical Chemistry (journal); Composite material; Chemistry; Thermodynamics; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004334705,0.0005717553,0.0007566206,0.0005338574,0.0003323751,0.000763763,0.0009564652,0.000868168,0.001225844],"category_scores_gemma":[0.0006576587,0.0004461586,0.0002268806,0.0005108758,0.0003356413,0.000817327,0.0003554854,0.0005763323,0.0003641824],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0007252566,"about_ca_system_score_gemma":0.000368992,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007179751,"about_ca_topic_score_gemma":0.001362187,"domain_scores_codex":[0.9991717,0.00006822992,0.00004003677,0.0002585472,0.0004033759,0.00005812524],"domain_scores_gemma":[0.9995434,0.0001678112,0.00006853551,0.00004526388,0.000141449,0.00003362398],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007531312,0.00002378028,0.0003937723,0.00005050905,0.000009037337,0.00003260717,0.00003373927,0.0001440636,0.9955755,0.0001074118,0.0000823507,0.00347182],"study_design_scores_gemma":[0.00001482094,0.0002227975,0.003846192,0.000008508362,0.00002934006,0.0002190233,0.00003864377,0.005599102,0.9886742,0.00005890033,0.00127173,0.0000166585],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8621374,0.001330197,0.1303962,0.0002337733,0.0002198892,0.0001410458,0.000492937,0.001629272,0.003419176],"genre_scores_gemma":[0.9082233,0.0005878456,0.08688483,0.0001434701,0.00003448262,0.0001136909,0.000242742,0.00007856471,0.003691202],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001225844,"threshold_uncertainty_score":0.005262136,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01569733084542884,"score_gpt":0.219881656915759,"score_spread":0.2041843260703302,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}