{"id":"W1975894596","doi":"10.1109/ccece.2010.5575127","title":"Static and dynamic analysis of a 2D MEMS micromirror","year":2010,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Dalhousie University","funders":"","keywords":"Gimbal; Microelectromechanical systems; Finite element method; Surface micromachining; Electronic engineering; Computer science; Mechanical engineering; Materials science; Engineering; Optoelectronics; Fabrication; Structural engineering; Aerospace engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001407634,0.0002076822,0.0002635618,0.0001786113,0.0002030805,0.0003425979,0.0003208668,0.0003658506,0.001045951],"category_scores_gemma":[0.0003449305,0.0002295897,0.0002810101,0.00009026627,0.000369447,0.0002519173,0.0002116907,0.000162793,0.0002102236],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003781262,"about_ca_system_score_gemma":0.0003281091,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00117913,"about_ca_topic_score_gemma":0.0008249823,"domain_scores_codex":[0.9998294,0.00001439429,0.000005741916,0.00003382996,0.0000969113,0.00001970556],"domain_scores_gemma":[0.999896,0.00003581661,0.00002088274,0.0000185398,0.00002133425,0.000007418356],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0001003352,0.00003244016,0.001433595,0.00008069603,0.00002286169,0.0003333523,0.0001105393,0.1064826,0.8799243,0.002908898,0.0001811983,0.008389103],"study_design_scores_gemma":[0.00002210127,0.0002456102,0.00394915,0.000006432388,0.00001215297,0.0001980483,0.00004381944,0.8942731,0.09903882,0.0002873465,0.001898065,0.00002536958],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9561511,0.0002919586,0.03519809,0.0000951724,0.000027679,0.00003960703,0.0001242035,0.000157093,0.007915189],"genre_scores_gemma":[0.9897985,0.00008972793,0.00814793,0.00001331342,0.0000053319,0.00002398119,0.00005238902,0.00001250561,0.001856317],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00117913,"threshold_uncertainty_score":0.003499031,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003601016036795713,"score_gpt":0.2247529811735333,"score_spread":0.2211519651367375,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}