{"id":"W1976136211","doi":"10.1116/1.3196782","title":"Growth scaling of metal oxide columnar thin films deposited by glancing angle depositions","year":2009,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","topic":"Optical Coatings and Gratings","field":"Materials Science","cited_by":14,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Institute for Nanotechnology; University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Deposition (geology); Materials science; Thin film; Scaling; Metal; Contact angle; Oxide; Composite material; Nanotechnology; Metallurgy; Geometry; Geology; Mathematics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00133691,0.000208462,0.0004173992,0.0005639392,0.0006111959,0.0002569412,0.0004288105,0.0001024698,0.000006493687],"category_scores_gemma":[0.0001357329,0.0001597873,0.00005287663,0.001040713,0.0005619033,0.0004962141,0.0000800555,0.0003137527,1.201313e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00009735009,"about_ca_system_score_gemma":0.0002465045,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000006612588,"about_ca_topic_score_gemma":0.000002731925,"domain_scores_codex":[0.9979342,0.00002977838,0.0006218223,0.0003353899,0.0005724154,0.0005063583],"domain_scores_gemma":[0.9984159,0.00001924769,0.0006638401,0.0001200631,0.000656497,0.000124453],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000365733,0.00004226794,0.0006570652,0.00003594244,0.00001179327,0.000001748304,0.0002638512,0.000003601336,0.9937966,0.0009878862,0.00001267375,0.004149933],"study_design_scores_gemma":[0.0005330581,0.001035637,0.001444729,0.0001385512,0.00009093347,0.0001950716,0.0001962823,0.0002413308,0.9844158,0.01147384,0.00002470871,0.0002100605],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9860481,0.01018622,0.003096277,0.0004393502,0.00005166273,0.0001065751,0.000004745925,0.00002426434,0.00004281055],"genre_scores_gemma":[0.9778127,0.00008849245,0.02194374,0.0001197552,0.00002037103,0.000001510533,5.492654e-7,0.000008589494,0.000004292508],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01884747,"threshold_uncertainty_score":0.6515936,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007692606516636139,"score_gpt":0.2192843472487545,"score_spread":0.2115917407321183,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}