{"id":"W1976442016","doi":"10.1117/12.436649","title":"<title>Vacuum spark point source for x-ray/EUV lithography</title>","year":2001,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"General Fusion (Canada)","funders":"","keywords":"Extreme ultraviolet lithography; Optics; Lithography; Computer science; Physics; Radiation; Optoelectronics; Electrical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.0004815407,0.00053819,0.0004962329,0.0008116281,0.0006729526,0.001124789,0.001013762,0.0008429615,0.09690496],"category_scores_gemma":[0.0004410055,0.0003108848,0.0002843002,0.0009266656,0.0005290769,0.001172176,0.0008213687,0.001038457,0.04102042],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.001503547,"about_ca_system_score_gemma":0.0009427736,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001552272,"about_ca_topic_score_gemma":0.001914876,"domain_scores_codex":[0.9995448,0.00003547411,0.00002248142,0.00008386338,0.0002583349,0.00005498258],"domain_scores_gemma":[0.9996951,0.00003050459,0.00003303479,0.00006477887,0.0001329095,0.00004383826],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"not_applicable","study_design_gemma":"not_applicable","study_design_scores_codex":[0.0002884642,0.0000744037,0.0006037034,0.000770096,0.00001959902,0.0003933997,0.000120287,0.0005993354,0.2418045,0.04016252,0.4865022,0.2286615],"study_design_scores_gemma":[0.00002975865,0.0001526793,0.0009575263,0.0000435669,0.000005750318,0.0004983698,0.0000328202,0.001242598,0.1436706,0.001051944,0.8522823,0.00003215269],"study_design_candidate":"not_applicable","study_design_consensus":"not_applicable","genre_codex":"other","genre_gemma":"other","genre_scores_codex":[0.0485537,0.01219846,0.1367896,0.006918559,0.01033039,0.001260414,0.0179614,0.03190099,0.7340864],"genre_scores_gemma":[0.1581711,0.007775656,0.08598538,0.00112964,0.0007741051,0.0005745007,0.01698419,0.006022579,0.7225828],"genre_candidate":"other","genre_consensus":"other","teacher_disagreement_score":0.9030951,"threshold_uncertainty_score":0.3241794,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009414641489067233,"score_gpt":0.2299707051664142,"score_spread":0.220556063677347,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}