{"id":"W1977510271","doi":"","title":"Analysis of space charge effects due to ESD in MEMS","year":2011,"lang":"en","type":"article","venue":"Electrical Overstress/Electrostatic Discharge Symposium","topic":"Electrostatic Discharge in Electronics","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Western University","funders":"","keywords":"Microelectromechanical systems; Capacitive sensing; Electrostatic discharge; Electric field; Space charge; Air gap (plumbing); Charge (physics); Materials science; Electrostatics; Electric charge; Electrical engineering; Electronic engineering; Optoelectronics; Engineering; Physics; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002144434,0.0003989555,0.0003362774,0.0002904459,0.0002236672,0.0003289011,0.0004036408,0.0005526877,0.001317296],"category_scores_gemma":[0.0007676782,0.000167923,0.000461141,0.0002272378,0.0003456146,0.0005673408,0.0003388119,0.0002792272,0.0002542192],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004983473,"about_ca_system_score_gemma":0.0003048681,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001609566,"about_ca_topic_score_gemma":0.0008735108,"domain_scores_codex":[0.999873,0.00001866547,0.000003059004,0.000008265441,0.00007710673,0.00001977737],"domain_scores_gemma":[0.9998141,0.00009814215,0.00002245627,0.00001716894,0.00003773605,0.00001037565],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008432939,0.00004093446,0.0009405619,0.0001390545,0.0000509543,0.00033891,0.00007714015,0.9167439,0.03924296,0.02546082,0.001088971,0.0157916],"study_design_scores_gemma":[0.000006032882,0.00005104685,0.0004870755,0.000006821869,0.000009301936,0.00004803445,0.00001172287,0.9915114,0.004065224,0.002851453,0.0009465023,0.000005338169],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.4734788,0.004533548,0.4816023,0.0006177202,0.0002816141,0.0001216557,0.000258317,0.0007799054,0.0383262],"genre_scores_gemma":[0.9841389,0.0009452386,0.006964733,0.00007154649,0.00005416695,0.00004794626,0.00007524555,0.00006425998,0.007637997],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.001609566,"threshold_uncertainty_score":0.00440681,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006029431643182539,"score_gpt":0.2127910381025211,"score_spread":0.2067616064593386,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}