{"id":"W1977643362","doi":"10.1088/0957-4484/24/5/055304","title":"Rapid fabrication of nano-structured quartz stamps","year":2013,"lang":"en","type":"article","venue":"Nanotechnology","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":21,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"Natural Sciences and Engineering Research Council of Canada; Mitacs","keywords":"Materials science; Fabrication; Embossing; Lithography; Nanotechnology; Electron-beam lithography; PDMS stamp; Nano-; Optoelectronics; Etching (microfabrication); Replication (statistics); Optics; Resist; Composite material","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002699611,0.0002008844,0.0002131626,0.0002021165,0.0002372126,0.0002646135,0.0003412396,0.0002323556,0.002281948],"category_scores_gemma":[0.0005277449,0.0002508749,0.0002422832,0.0001625874,0.0002567493,0.0003062013,0.0003186967,0.0005971757,0.0007839384],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003098141,"about_ca_system_score_gemma":0.0002824579,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002706523,"about_ca_topic_score_gemma":0.0008824239,"domain_scores_codex":[0.9997782,0.0000103852,0.00002032395,0.00005313763,0.0001078027,0.00003006904],"domain_scores_gemma":[0.9995829,0.0001075149,0.0001045402,0.00008309949,0.00007717601,0.0000447349],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000170291,0.000007706552,0.00008444146,0.00003091359,0.000002833976,0.000031182,0.00002259421,0.0003474142,0.9966428,0.0003287025,0.0001358053,0.002348538],"study_design_scores_gemma":[0.00001045262,0.00009064917,0.000466248,0.0000028107,0.000003236926,0.00004968254,0.00001242109,0.002619668,0.9930594,0.00007068967,0.003608069,0.000006775909],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.84845,0.001178762,0.1370244,0.0003250425,0.0003761731,0.0003925868,0.001987882,0.001062449,0.009202737],"genre_scores_gemma":[0.8249757,0.001175571,0.1629734,0.00008112527,0.00005571113,0.0002108245,0.001575476,0.0001203835,0.008831863],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002281948,"threshold_uncertainty_score":0.007633805,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005899073556960586,"score_gpt":0.198823207210479,"score_spread":0.1929241336535184,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}