{"id":"W1977960679","doi":"10.1007/s00339-004-2781-0","title":"Effect of process parameters on the mechanical properties of carbon nitride thin films synthesized by plasma assisted pulsed laser deposition","year":2004,"lang":"en","type":"article","venue":"Applied Physics A","topic":"Diamond and Carbon-based Materials Research","field":"Materials Science","cited_by":2,"is_retracted":false,"has_abstract":false,"ca_institutions":"Institut National de la Recherche Scientifique","funders":"","keywords":"Thin film; Pulsed laser deposition; Materials science; Plasma; Carbon nitride; Deposition (geology); Carbon film; Analytical Chemistry (journal); Laser ablation; Nitride; Laser; Nanotechnology; Chemistry; Layer (electronics); Optics; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0006165594,0.0002008881,0.0003958963,0.00002858475,0.00006961998,0.00005362293,0.0003297896,0.00008397809,0.00001638286],"category_scores_gemma":[0.00009473935,0.0001209394,0.00008009258,0.0001905791,0.0001712796,0.00004485249,0.00004659982,0.0001185523,0.00001223618],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003371176,"about_ca_system_score_gemma":0.00008398881,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001900418,"about_ca_topic_score_gemma":0.000002499727,"domain_scores_codex":[0.9983601,0.0001978415,0.0003028721,0.0002859888,0.000575748,0.0002774629],"domain_scores_gemma":[0.9989949,0.0003679667,0.000190519,0.0003308899,0.00006073261,0.0000549798],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.001455489,0.0002226687,0.000001411305,0.000274207,0.00002373629,0.000001107619,0.0001010211,0.002070593,0.9947252,0.0006714364,0.00001160188,0.0004415226],"study_design_scores_gemma":[0.001013853,0.0003736873,0.000002550615,0.0001704803,0.0000449411,5.159596e-7,0.00005349978,0.0007977581,0.9963979,0.001012386,4.741475e-7,0.0001320237],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9984606,0.00000930844,0.00003214152,0.00004311636,0.00005978464,0.0007586785,0.00004214289,0.00004089822,0.0005533379],"genre_scores_gemma":[0.9994577,0.000002639123,0.00007115163,0.00004234476,0.00002105039,0.0003602595,0.00001248861,0.00002742679,0.000004968158],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001672625,"threshold_uncertainty_score":0.4931766,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01334451368844845,"score_gpt":0.2351356376416962,"score_spread":0.2217911239532478,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}