{"id":"W1978222129","doi":"10.1007/s00542-009-1014-z","title":"Calibration of residual stress difference of MetalMUMPs silicon nitride films","year":2010,"lang":"en","type":"article","venue":"Microsystem Technologies","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":false,"ca_institutions":"Toronto Metropolitan University","funders":"","keywords":"Materials science; Silicon nitride; Residual stress; Nitride; Silicon; Microelectromechanical systems; Thin film; Nickel; Composite material; Stress (linguistics); Optoelectronics; Metallurgy; Nanotechnology; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003544975,0.0004371867,0.0001974083,0.0003144922,0.0002429302,0.0002842035,0.0008150626,0.0007289293,0.00217445],"category_scores_gemma":[0.0007044765,0.0001855117,0.0001612655,0.0003141461,0.000253791,0.0003979983,0.0002296586,0.0003515805,0.0003125169],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003940755,"about_ca_system_score_gemma":0.0001719728,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007398147,"about_ca_topic_score_gemma":0.001567137,"domain_scores_codex":[0.9995448,0.00004016873,0.00001989925,0.0001352137,0.0002088958,0.0000509704],"domain_scores_gemma":[0.9994443,0.0001155467,0.00007684197,0.0000999812,0.000230705,0.00003262512],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001458295,0.00003529259,0.00150217,0.00004364834,0.00001053193,0.00008435433,0.00007973723,0.0003129517,0.9927758,0.0001174845,0.0001670216,0.004725239],"study_design_scores_gemma":[0.0000122891,0.0004297766,0.01134854,0.000008441592,0.00001763101,0.000156428,0.000093217,0.007081809,0.979831,0.00006145828,0.0009484474,0.00001088985],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9888113,0.0004001572,0.007879574,0.00009962851,0.0001188091,0.00002693491,0.0002526747,0.0002855773,0.002125467],"genre_scores_gemma":[0.9925534,0.0002063539,0.005275937,0.00005010978,0.00002060467,0.00002253139,0.0002260992,0.00003905357,0.001605908],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00217445,"threshold_uncertainty_score":0.00727421,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007234367619825477,"score_gpt":0.2070376937179073,"score_spread":0.1998033260980818,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}