{"id":"W1978360568","doi":"10.1016/j.ceramint.2015.03.257","title":"Preparation and properties of ZrO2 and TiO2 films and their nanolaminates by atomic layer deposition","year":2015,"lang":"en","type":"article","venue":"Ceramics International","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":17,"is_retracted":false,"has_abstract":false,"ca_institutions":"Simon Fraser University","funders":"National Natural Science Foundation of China","keywords":"Atomic layer deposition; Materials science; Dielectric; Anatase; Monoclinic crystal system; Deposition (geology); Layer (electronics); Titanium; Wafer; Thin film; Zirconium; Phase (matter); High-κ dielectric; Silicon; Chemical engineering; Analytical Chemistry (journal); Nanotechnology; Crystallography; Metallurgy; Optoelectronics; Crystal structure; Chemistry; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001490491,0.0001953882,0.0001791325,0.0002641298,0.000244573,0.000327643,0.0003166934,0.0002104604,0.001201802],"category_scores_gemma":[0.0003095554,0.00019315,0.0001511736,0.0002639354,0.0001268465,0.0002461451,0.0001226381,0.0002655848,0.0002784092],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000294879,"about_ca_system_score_gemma":0.0002168314,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.003307477,"about_ca_topic_score_gemma":0.004023668,"domain_scores_codex":[0.9998928,0.000006025582,0.00001006703,0.00001641333,0.00005124134,0.0000235099],"domain_scores_gemma":[0.9999012,0.00001676234,0.00002217054,0.00001611456,0.00003248482,0.00001122806],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003858429,0.000004834805,0.0001211923,0.00003723397,0.000003044581,0.00002374594,0.00001523531,0.00007455674,0.9988897,0.00007012246,0.00005156846,0.0006700678],"study_design_scores_gemma":[0.000008947615,0.0000466008,0.002529805,0.000002865112,0.000008057498,0.00003678602,0.0000335741,0.0005855329,0.9951284,0.00001927904,0.001595099,0.000005023525],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9882286,0.002931027,0.003817397,0.0001406805,0.00006215926,0.00004016421,0.0009261029,0.0001021823,0.003751625],"genre_scores_gemma":[0.9922714,0.001140106,0.003360579,0.0000277617,0.00001615104,0.00002425999,0.0005871126,0.00002835494,0.002544173],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003307477,"threshold_uncertainty_score":0.006576478,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01779827795049431,"score_gpt":0.2271934944320008,"score_spread":0.2093952164815065,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}