{"id":"W1978915034","doi":"10.1116/1.1448511","title":"Room-temperature fabrication of hard AlN/TiN superlattice coatings by pulsed laser deposition","year":2002,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":16,"is_retracted":false,"has_abstract":true,"ca_institutions":"York University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Pulsed laser deposition; Tin; Nanoindentation; Superlattice; Quartz crystal microbalance; Deposition (geology); Bilayer; Fabrication; Optoelectronics; Thin film; Analytical Chemistry (journal); Nanotechnology; Composite material; Metallurgy","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001920641,0.0003375114,0.0003680389,0.0002507523,0.0002881459,0.0003306491,0.0005476497,0.0002318891,0.0009573153],"category_scores_gemma":[0.0004116468,0.0004213033,0.0002232443,0.0002074985,0.0002360678,0.000314632,0.000397834,0.0005152613,0.0003166943],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005484954,"about_ca_system_score_gemma":0.0004114996,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001477654,"about_ca_topic_score_gemma":0.004409757,"domain_scores_codex":[0.9997492,0.000009317329,0.00001523671,0.0000418874,0.0001576077,0.00002668334],"domain_scores_gemma":[0.9996973,0.00004894559,0.000079299,0.00005492734,0.00006880942,0.00005079832],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001063753,0.00000351659,0.00003874542,0.00002404143,0.000001599732,0.00001716403,0.000008511581,0.00007490588,0.9991145,0.00002811844,0.00001349538,0.0006648507],"study_design_scores_gemma":[0.00001427008,0.00005887596,0.000941966,0.000002618733,0.000005494674,0.00007766618,0.00001193014,0.00193555,0.9961208,0.00002349564,0.0008008555,0.000006586903],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9814975,0.0008627676,0.01491227,0.00006563609,0.00007137665,0.00008094639,0.0002709352,0.0001635582,0.002074951],"genre_scores_gemma":[0.943427,0.0006992847,0.05255397,0.00003800163,0.00002819588,0.0000963055,0.0002777146,0.00008998172,0.002789606],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001477654,"threshold_uncertainty_score":0.003979623,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007920767864865612,"score_gpt":0.1951528161251772,"score_spread":0.1872320482603115,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}