{"id":"W1979080919","doi":"10.1116/1.1387458","title":"Calibrated scanning spreading resistance microscopy profiling of carriers in III–V structures","year":2001,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":37,"is_retracted":false,"has_abstract":true,"ca_institutions":"Nortel (Canada); Simon Fraser University","funders":"","keywords":"Spreading resistance profiling; Materials science; Optoelectronics; Heterojunction; Secondary ion mass spectrometry; Molecular beam epitaxy; Microscopy; Electron beam-induced current; Doping; Dopant; Analytical Chemistry (journal); Epitaxy; Common emitter; Schottky diode; Silicon; Mass spectrometry; Chemistry; Nanotechnology; Optics; Diode","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0007450067,0.0002585399,0.0005080131,0.001796982,0.000219121,0.0001801046,0.0004013069,0.0001430691,0.000004188614],"category_scores_gemma":[0.00003607561,0.0002077872,0.00005016486,0.002242748,0.0004741315,0.0005110247,0.00003882641,0.0005342389,2.878392e-8],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000266484,"about_ca_system_score_gemma":0.0003147724,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000006685435,"about_ca_topic_score_gemma":0.00002537549,"domain_scores_codex":[0.9981011,0.00001659662,0.0006680747,0.0002911489,0.0003761076,0.0005470283],"domain_scores_gemma":[0.9989964,0.00001087362,0.000342075,0.0001462183,0.0004102394,0.00009415061],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004224738,0.000007769135,0.005296622,0.00008987387,0.00006385188,0.000005590209,0.0007098258,0.0001866781,0.984736,0.0006259655,0.00000459858,0.00823099],"study_design_scores_gemma":[0.001174509,0.0002547959,0.0008477029,0.0004686412,0.0001355436,0.0001859271,0.001897753,0.001882636,0.976119,0.01610737,0.0004393535,0.000486769],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9669737,0.0309724,0.001651792,0.00006397832,0.00009668773,0.00009549368,0.000002719175,0.00002707479,0.0001161698],"genre_scores_gemma":[0.9972984,0.0007020077,0.001924488,0.00001542604,0.00003022386,0.000001866873,8.355352e-7,0.000019478,0.000007226397],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03032476,"threshold_uncertainty_score":0.8473318,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0102682011762349,"score_gpt":0.2247368097695898,"score_spread":0.214468608593355,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}