{"id":"W1979889653","doi":"10.1063/1.4812475","title":"ZrO<sub>2</sub> on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition","year":2013,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":15,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Atomic layer deposition; Materials science; Capacitor; Oxide; Capacitance; Hysteresis; Analytical Chemistry (journal); Layer (electronics); Wide-bandgap semiconductor; Optoelectronics; Metal; Deposition (geology); Semiconductor; Electrode; Nanotechnology; Chemistry; Voltage; Metallurgy; Condensed matter physics; Electrical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow","insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.00005385251,0.0003944781,0.000350492,0.00007450503,0.00009056304,0.0001365832,0.0001968959,0.0001251642,0.00004147851],"category_scores_gemma":[0.000001915883,0.0003912132,0.0001133329,0.0001642473,0.00005810071,0.0003089187,0.00002309906,0.0002400647,0.0009252877],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001330347,"about_ca_system_score_gemma":0.000007967916,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000617537,"about_ca_topic_score_gemma":0.000003178362,"domain_scores_codex":[0.9985927,0.00002574859,0.000314445,0.0003629601,0.000253626,0.0004505513],"domain_scores_gemma":[0.9993335,0.00006769152,0.00009133653,0.0003583873,0.00002354369,0.0001255379],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000009399582,0.00002836908,0.00002950571,0.0000511463,0.0001257585,0.00000276625,0.0001260095,0.002408774,0.9928966,0.0002152466,0.002968334,0.001138106],"study_design_scores_gemma":[0.0003877206,0.00001186966,0.0009536616,0.00002239963,0.00005180206,0.000006745429,0.00003374288,0.001001116,0.9968549,0.00012985,0.00008198665,0.0004641928],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9972194,0.000010729,0.0004563904,0.00005374927,0.0008463226,0.0003776374,0.00001988641,0.0004597746,0.0005561113],"genre_scores_gemma":[0.9975837,0.000004781421,0.0002549607,0.001169357,0.0006150734,0.0001605435,0.0000942295,0.0001153248,0.000002034238],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003958329,"threshold_uncertainty_score":0.999854,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01138791115492375,"score_gpt":0.1862638266262768,"score_spread":0.174875915471353,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}