{"id":"W1980577484","doi":"10.1116/1.3674162","title":"Populations of metastable and resonant argon atoms in radio frequency magnetron plasmas used for deposition of indium-zinc-oxide films","year":2012,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"ZnO doping and properties","field":"Materials Science","cited_by":14,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Montréal","funders":"","keywords":"Metastability; Argon; Atomic physics; Excited state; Langmuir probe; Sputter deposition; Plasma; Analytical Chemistry (journal); High-power impulse magnetron sputtering; Chemistry; Materials science; Sputtering; Thin film; Plasma diagnostics; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002688712,0.0002337709,0.0002671018,0.0002946718,0.0002751854,0.000375544,0.0004977747,0.0002784732,0.000490805],"category_scores_gemma":[0.0005092152,0.0002553553,0.0001726348,0.0002740428,0.000274328,0.0004191691,0.000196809,0.0002746879,0.0001080801],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00038402,"about_ca_system_score_gemma":0.0001568932,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001299242,"about_ca_topic_score_gemma":0.001620709,"domain_scores_codex":[0.9996645,0.00004032589,0.00001900665,0.00009544597,0.0001276288,0.00005310271],"domain_scores_gemma":[0.9997581,0.0001190041,0.00005129868,0.00001492524,0.0000402362,0.00001646615],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008518524,0.000007681865,0.0009373599,0.00003223107,0.000007364295,0.00003600475,0.00008109107,0.0001178091,0.9974602,0.00005005853,0.000009912387,0.001175036],"study_design_scores_gemma":[0.000005378222,0.00009489577,0.00600411,0.000002895666,0.000009884142,0.00006726302,0.0000601362,0.001363393,0.9920753,0.00002461673,0.0002877854,0.00000435761],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9976404,0.0002939639,0.001516189,0.00001334974,0.000003452544,0.000009625991,0.00007984753,0.00002765753,0.0004155324],"genre_scores_gemma":[0.9981312,0.0002412361,0.001242144,0.000006573337,0.00000230127,0.00001168572,0.000093148,0.00001267564,0.0002591252],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001299242,"threshold_uncertainty_score":0.002786279,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0255652372224155,"score_gpt":0.2688499613669179,"score_spread":0.2432847241445024,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}