{"id":"W1981591707","doi":"10.1116/1.591384","title":"Kinetic simulation of metal chemical-vapor deposition on high aspect ratio features in modern very-large-scale-integrated processing","year":2000,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University; University of Alberta","funders":"","keywords":"Tungsten; Deposition (geology); Chemical vapor deposition; Kinetic energy; Desorption; Materials science; Adsorption; Thin film; Sticking probability; Chemical physics; Chemistry; Chemical engineering; Thermodynamics; Nanotechnology; Physical chemistry; Metallurgy; Geology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001992164,0.0003675219,0.0005414531,0.0002492603,0.0004013492,0.0005239325,0.0006868044,0.001087344,0.001333724],"category_scores_gemma":[0.0006964494,0.0003890499,0.0004055918,0.0003845999,0.0004789428,0.0005069347,0.0002655711,0.0004095817,0.0001756024],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0009195958,"about_ca_system_score_gemma":0.0007185367,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.01055729,"about_ca_topic_score_gemma":0.005659369,"domain_scores_codex":[0.9999061,0.00001735734,0.000003542513,0.00001236943,0.0000339804,0.00002661958],"domain_scores_gemma":[0.999793,0.0001305668,0.00002061678,0.00001226657,0.00002675856,0.00001679554],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00002121858,0.00002137649,0.0006576579,0.00002238627,0.00000694976,0.00006707556,0.00002167758,0.992165,0.004242418,0.001785183,0.00009100882,0.0008981508],"study_design_scores_gemma":[0.000005043589,0.000007581707,0.0001584271,8.890542e-7,9.267317e-7,0.000005916905,0.000004680559,0.9989114,0.0006000253,0.0001867203,0.0001158573,0.000002602834],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8998363,0.0003669936,0.08459552,0.0003332229,0.00004626776,0.0001067532,0.0003834081,0.000355745,0.01397582],"genre_scores_gemma":[0.9841632,0.0001936065,0.0126792,0.0000358527,0.000007584116,0.0001188156,0.0001801446,0.00004477751,0.002576795],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01055729,"threshold_uncertainty_score":0.02099168,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008031771229534988,"score_gpt":0.2105342028065839,"score_spread":0.2025024315770489,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}