{"id":"W1981697897","doi":"10.1117/12.573895","title":"A 100-channel near-infrared SOI waveguide microspectrometer: design and fabrication challenges","year":2005,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":19,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Research Council Canada","funders":"","keywords":"Silicon on insulator; Materials science; Fabrication; Optoelectronics; Spectral resolution; Optics; Waveguide; Near-infrared spectroscopy; Silicon; Silicon photonics; Physics; Spectral line","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0006100446,0.0003721419,0.0002996772,0.0002129649,0.0003306974,0.0005847728,0.000892486,0.0006575848,0.001013017],"category_scores_gemma":[0.0003961248,0.0002925174,0.0001958993,0.0002421696,0.0004752763,0.0008770144,0.0003286748,0.0006009017,0.0006022806],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006263909,"about_ca_system_score_gemma":0.0006210026,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009013248,"about_ca_topic_score_gemma":0.002712334,"domain_scores_codex":[0.9996579,0.00003098993,0.000013216,0.0000802256,0.0001787037,0.00003888298],"domain_scores_gemma":[0.9994702,0.0001622365,0.00008430785,0.00006377482,0.0001438783,0.00007553265],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003433141,0.00002260134,0.0004500097,0.0001823769,0.000007909369,0.00005690837,0.00007084353,0.0007008138,0.9775254,0.001502259,0.0006055075,0.01884091],"study_design_scores_gemma":[0.00001621977,0.0004196672,0.004088072,0.00001494918,0.00002548256,0.0009416029,0.0001001178,0.01528233,0.944931,0.0006051807,0.0335251,0.00005029769],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6177421,0.01853552,0.3470731,0.002631447,0.0003224267,0.0003031074,0.0007598882,0.002308335,0.01032405],"genre_scores_gemma":[0.4279037,0.005675954,0.5558342,0.0003380557,0.0001261807,0.0002737836,0.0009390984,0.0002392623,0.00866967],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001013017,"threshold_uncertainty_score":0.004544735,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01545375141053521,"score_gpt":0.2211926943697919,"score_spread":0.2057389429592567,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}