{"id":"W1981721003","doi":"10.1149/1.2993153","title":"Three-Step Room-Temperature Cleaning of Bare Silicon Surface for Radical-Reaction-Based Semiconductor Manufacturing","year":2008,"lang":"en","type":"article","venue":"Journal of The Electrochemical Society","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":9,"is_retracted":false,"has_abstract":true,"ca_institutions":"Hatch (Canada)","funders":"","keywords":"Ultrapure water; Wafer; Silicon; Isopropyl alcohol; Chemical engineering; Semiconductor; Chemistry; Wet cleaning; Hydrogen peroxide; Materials science; Nanotechnology; Optoelectronics; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002001212,0.0003716137,0.0003989394,0.0001599407,0.0001821723,0.0002695835,0.0005606152,0.000350484,0.00109392],"category_scores_gemma":[0.000250835,0.0001869668,0.0003993071,0.0001073227,0.0001712051,0.0002588222,0.0002707978,0.000592416,0.0005642097],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001840273,"about_ca_system_score_gemma":0.0002580615,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000180962,"about_ca_topic_score_gemma":0.0005519371,"domain_scores_codex":[0.9998044,0.0000146493,0.00001146797,0.00004254037,0.00009886312,0.00002810053],"domain_scores_gemma":[0.999823,0.00004360411,0.00003695921,0.00004273358,0.00004063714,0.00001302528],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001135394,0.000008368912,0.00007823947,0.00006477243,0.00000583993,0.00002268197,0.00001513057,0.00006034213,0.9961403,0.0001129463,0.00005246777,0.00342753],"study_design_scores_gemma":[0.000002935038,0.00005499506,0.0004032498,0.000001835681,0.000006796864,0.0000902581,0.000006959745,0.0004759946,0.9974137,0.00003528735,0.001502515,0.0000053955],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7967677,0.003683694,0.1941774,0.0002403686,0.0002521202,0.0002296866,0.0002298768,0.0007679487,0.00365123],"genre_scores_gemma":[0.8506601,0.001154757,0.1432738,0.0001001613,0.00003006769,0.0001270671,0.0003750481,0.0001090181,0.004169962],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00109392,"threshold_uncertainty_score":0.003659546,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01099881629472008,"score_gpt":0.2101325895344994,"score_spread":0.1991337732397793,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}