{"id":"W1981990546","doi":"10.1557/proc-0910-a18-02","title":"Hot-wire CVD a-Si:H TFT on Plastic Substrates","year":2006,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":false,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Materials science; Thin-film transistor; Plasma-enhanced chemical vapor deposition; Chemical vapor deposition; Amorphous silicon; Optoelectronics; Gate dielectric; Substrate (aquarium); Amorphous solid; Silicon; Fabrication; Transistor; Nanotechnology; Layer (electronics); Electrical engineering; Crystalline silicon; Crystallography","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.00005388247,0.0002587792,0.000202897,0.0001809011,0.00007458635,0.00008149615,0.000276908,0.0001976181,0.00003444272],"category_scores_gemma":[0.00004555378,0.000256465,0.0000606292,0.0003025529,0.00008048254,0.0001889881,0.00001611145,0.0003286108,0.0002180181],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001079707,"about_ca_system_score_gemma":0.000007167855,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002343406,"about_ca_topic_score_gemma":0.00001693383,"domain_scores_codex":[0.9989089,0.000001010618,0.0002186145,0.0002599347,0.000208339,0.0004032397],"domain_scores_gemma":[0.9997274,0.00004231692,0.00002926034,0.0001116962,0.00004641523,0.00004287749],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001125294,0.0002208005,0.01540122,0.001156616,0.0001374654,0.00006801701,0.001111076,0.008672908,0.7668328,0.0564597,0.145425,0.004401839],"study_design_scores_gemma":[0.001018592,0.0002984445,0.06824632,0.000316371,0.00007510161,0.00003968872,0.0006758336,0.006653298,0.8852346,0.005847231,0.0302383,0.001356236],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9747962,0.0002971922,0.0000614517,0.0001160191,0.0003360836,0.0001287986,0.00000895945,0.003360797,0.02089449],"genre_scores_gemma":[0.9988332,0.00001953065,0.0005876347,0.00002267264,0.0001166094,0.00003721805,0.000004641897,0.00006781766,0.000310638],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1184018,"threshold_uncertainty_score":0.9999887,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006937987676345562,"score_gpt":0.1761814001889508,"score_spread":0.1692434125126052,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}