{"id":"W1981990546","doi":"10.1557/proc-0910-a18-02","title":"Hot-wire CVD a-Si:H TFT on Plastic Substrates","year":2006,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":false,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Materials science; Thin-film transistor; Plasma-enhanced chemical vapor deposition; Chemical vapor deposition; Amorphous silicon; Optoelectronics; Gate dielectric; Substrate (aquarium); Amorphous solid; Silicon; Fabrication; Transistor; Nanotechnology; Layer (electronics); Electrical engineering; Crystalline silicon; Crystallography","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001031447,0.0002090216,0.0002982068,0.0002155828,0.0004775444,0.0004050049,0.0004589453,0.000354117,0.002850803],"category_scores_gemma":[0.0002594218,0.0002523101,0.0001195717,0.0002465481,0.0001859559,0.0003937905,0.0001800448,0.0003218275,0.0006712027],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004561185,"about_ca_system_score_gemma":0.000246768,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00225017,"about_ca_topic_score_gemma":0.004677629,"domain_scores_codex":[0.9998833,0.000005219229,0.000005226606,0.0000347577,0.0000360951,0.00003534825],"domain_scores_gemma":[0.9998682,0.00004538706,0.00001957795,0.00002588601,0.00002585103,0.00001518918],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001972825,0.00001216548,0.0003221364,0.00009308226,0.0000100589,0.0001905785,0.00006058266,0.0002926187,0.996308,0.0001476673,0.0005126954,0.001853135],"study_design_scores_gemma":[0.00001820192,0.0001358359,0.001962289,0.000007594508,0.00000668749,0.0001081964,0.00006365624,0.00150789,0.9945797,0.00005628412,0.001546774,0.000006977252],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9911186,0.0006822363,0.001532484,0.0001612818,0.0001269097,0.00002186189,0.0006499956,0.0001805989,0.005526015],"genre_scores_gemma":[0.9946444,0.0002952376,0.001820052,0.00002335611,0.0000240813,0.00001247934,0.0002341628,0.00004239717,0.002903756],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002850803,"threshold_uncertainty_score":0.009536862,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006937987676345562,"score_gpt":0.1761814001889508,"score_spread":0.1692434125126052,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}