{"id":"W1982763945","doi":"10.1016/j.optlaseng.2009.01.009","title":"Laser singulation of thin wafer: Die strength and surface roughness analysis of 80μm silicon dice","year":2009,"lang":"en","type":"article","venue":"Optics and Lasers in Engineering","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":35,"is_retracted":false,"has_abstract":false,"ca_institutions":"Toronto Metropolitan University","funders":"","keywords":"Die (integrated circuit); Wafer dicing; Materials science; Wafer; Surface roughness; Surface finish; Laser; Composite material; Silicon; Dice; Femtosecond; Bending; Optics; Optoelectronics; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001303786,0.0001259628,0.000283269,0.0001847412,0.00001179652,0.00002268784,0.0000585108,0.00006909315,0.000001782254],"category_scores_gemma":[0.00002364877,0.0001320107,0.000025602,0.0003159294,0.00001958131,0.0001280101,0.00001868295,0.0000760792,3.935292e-8],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000169651,"about_ca_system_score_gemma":0.000003995381,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002831082,"about_ca_topic_score_gemma":0.00001784015,"domain_scores_codex":[0.9994094,0.000006406512,0.0002541935,0.0001161249,0.00008702541,0.000126847],"domain_scores_gemma":[0.9997285,0.00004783305,0.00004028875,0.0001226897,0.00002561274,0.00003505109],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.000006807854,0.00002141785,0.001181534,0.0002230114,0.00007386175,0.000002557141,0.000305235,0.9387965,0.05728786,0.0002095595,0.000001673207,0.00189002],"study_design_scores_gemma":[0.0001440113,0.00002878506,0.01365818,0.000113936,0.0001031486,3.436281e-7,0.00002435271,0.8700932,0.1156205,0.00006846251,0.00001073944,0.0001343965],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9954718,0.000231034,0.003946503,0.000008935178,0.00004237628,0.0000542712,0.00001529735,0.0001009084,0.0001288725],"genre_scores_gemma":[0.9917219,0.0002106463,0.008022973,0.000003099327,0.00000928589,9.377746e-7,0.00001249707,0.0000147277,0.000003991329],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.06870327,"threshold_uncertainty_score":0.5383239,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004877068739446728,"score_gpt":0.2067799999151279,"score_spread":0.2019029311756811,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}