{"id":"W1982764664","doi":"10.1063/1.1330226","title":"Smooth wet etching by ultraviolet-assisted photoetching and its application to the fabrication of AlGaN/GaN heterostructure field-effect transistors","year":2000,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":27,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institute for Microstructural Sciences; Simon Fraser University","funders":"","keywords":"Materials science; Fabrication; Optoelectronics; Etching (microfabrication); Heterojunction; Ultraviolet; Wafer; Surface roughness; Transistor; Nanotechnology; Voltage; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001485624,0.0002229019,0.000150504,0.0001917269,0.0001380696,0.0002685433,0.0002415903,0.0002739021,0.0003181967],"category_scores_gemma":[0.0001566833,0.0002012107,0.0001600196,0.0001384681,0.0002879312,0.0001764037,0.0001800534,0.0002086562,0.00009278096],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001588965,"about_ca_system_score_gemma":0.0001034579,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000330149,"about_ca_topic_score_gemma":0.000726054,"domain_scores_codex":[0.9998991,0.00001025808,0.000005648139,0.00002027918,0.00004803386,0.00001670859],"domain_scores_gemma":[0.9999113,0.00002473,0.00003079207,0.00001591426,0.00001096098,0.000006337527],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001083953,0.000005101262,0.0001163961,0.00003113229,0.0000036554,0.00003349127,0.00001661666,0.0001609997,0.9969483,0.00006734324,0.00001637134,0.002589702],"study_design_scores_gemma":[0.00000604043,0.0001404069,0.002071689,0.00000255785,0.000006576094,0.000242961,0.00001465058,0.001769013,0.9950069,0.00007335251,0.0006574094,0.000008386731],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9803432,0.002231178,0.01591261,0.00006269003,0.00002943563,0.00003337702,0.00008281242,0.0001209428,0.001183674],"genre_scores_gemma":[0.9781446,0.001201112,0.01991066,0.0000240059,0.00001166706,0.00001710855,0.00006428987,0.00001446839,0.0006121261],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.000330149,"threshold_uncertainty_score":0.001152813,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005002934087505286,"score_gpt":0.2129120162298768,"score_spread":0.2079090821423715,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}