{"id":"W1982887219","doi":"10.1117/12.759533","title":"Microstructured humidity sensors fabricated by glancing angle deposition: characterization and performance evaluation","year":2007,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Optical Coatings and Gratings","field":"Materials Science","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Institute for Nanotechnology; University of Alberta","funders":"National Research Council Canada; Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Humidity; Repeatability; Annealing (glass); Thin film; Characterization (materials science); Porosity; Optoelectronics; Deposition (geology); Composite material; Optics; Nanotechnology; Meteorology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001574529,0.0002555308,0.0003133395,0.00006557012,0.0001788481,0.0001771804,0.000379171,0.0001845385,0.00002091822],"category_scores_gemma":[0.000481221,0.0002153157,0.0001769356,0.0002808383,0.0002072288,0.0007047585,0.0001097603,0.0002119306,0.000001482387],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001772555,"about_ca_system_score_gemma":0.00002622586,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000009818239,"about_ca_topic_score_gemma":1.732264e-7,"domain_scores_codex":[0.9978065,3.71088e-8,0.0006829434,0.0003904716,0.0007464406,0.000373557],"domain_scores_gemma":[0.9974467,0.0001083515,0.0005036431,0.00004631656,0.001772416,0.0001226227],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000104781,0.0000530301,0.0007879582,0.0002343558,0.00004567623,4.032789e-8,0.0002789036,0.00001316573,0.9853401,0.01121204,0.0003288327,0.001601079],"study_design_scores_gemma":[0.0006602623,0.0002628517,0.006828087,0.0001578887,0.00009318594,0.0000174813,0.0004314539,0.02482841,0.9658054,0.000112364,0.0005541228,0.0002484529],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9978088,0.00005340817,0.0001533582,0.0006823419,0.0001918833,0.0005315089,0.00006489509,0.0000731338,0.0004407357],"genre_scores_gemma":[0.9487979,0.00003393926,0.05065992,0.00008885925,0.0002369269,0.00004310608,0.00004625,0.0000336261,0.0000595095],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.05050657,"threshold_uncertainty_score":0.878032,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009703424069328243,"score_gpt":0.2291886575440213,"score_spread":0.219485233474693,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}