{"id":"W1983069059","doi":"10.1504/ijista.2008.018173","title":"Static and dynamic evaluation of Silicon-On-Insulator-based scanning micromirrors","year":2008,"lang":"en","type":"article","venue":"International Journal of Intelligent Systems Technologies and Applications","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"Natural Sciences and Engineering Research Council of Canada; CMC Microsystems","keywords":"Silicon on insulator; Materials science; Wafer; Laser Doppler vibrometer; Microfabrication; Surface micromachining; Silicon; Wafer bonding; Optoelectronics; Microelectromechanical systems; Interferometry; Laser; Optics; Photomask; Electronic engineering; Nanotechnology; Engineering; Fabrication; Distributed feedback laser; Resist","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0006105533,0.000372063,0.0003576657,0.0003669612,0.0001743707,0.0003338919,0.0004655957,0.0003593598,0.000589832],"category_scores_gemma":[0.001623956,0.000259598,0.0002341671,0.0001846919,0.0002870013,0.0004505032,0.0002714676,0.0002037461,0.0001853788],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002767116,"about_ca_system_score_gemma":0.0001576597,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000352509,"about_ca_topic_score_gemma":0.0006281042,"domain_scores_codex":[0.9992959,0.00008453877,0.00004354697,0.0001164449,0.0003786162,0.00008091023],"domain_scores_gemma":[0.9988856,0.0003396552,0.0002012922,0.0001186059,0.0003831044,0.00007190243],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006323091,0.00001094128,0.0004185397,0.00004526311,0.000005810421,0.00004248196,0.00004184444,0.0002354149,0.9950733,0.00005515445,0.00002132185,0.003986718],"study_design_scores_gemma":[0.000006574713,0.0005878031,0.004209251,0.000005096228,0.00002066478,0.0002424237,0.00006930524,0.00499556,0.9890003,0.00001644007,0.0008326334,0.00001398826],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9884387,0.001373372,0.008446282,0.00002989413,0.0000615005,0.00004679011,0.0000748987,0.000130283,0.001398291],"genre_scores_gemma":[0.9880329,0.0004033875,0.01055735,0.00001504177,0.00001241552,0.00001919435,0.00007336515,0.00002210034,0.0008642874],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0006105533,"threshold_uncertainty_score":0.003228962,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02461304934816666,"score_gpt":0.2903649886872268,"score_spread":0.2657519393390602,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}