{"id":"W1983458037","doi":"10.1109/icsens.2013.6688242","title":"Shaped combs and parametric amplification in inertial MEMS sensors","year":2013,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"","keywords":"Parametric statistics; Parametric oscillator; Gyroscope; Modulation (music); Voltage; Physics; Stiffness; Inertial frame of reference; Control theory (sociology); Acoustics; Optics; Electronic engineering; Computer science; Engineering; Mathematics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001914802,0.0002691585,0.0001961422,0.0002034241,0.000174572,0.0003025032,0.0004256721,0.0004791232,0.0008255466],"category_scores_gemma":[0.0004589166,0.0002047459,0.000200161,0.0001556009,0.0003372235,0.0004881181,0.0001896096,0.0002191098,0.0003451392],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00018164,"about_ca_system_score_gemma":0.000101438,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001177742,"about_ca_topic_score_gemma":0.0002021765,"domain_scores_codex":[0.9998192,0.00002516184,0.00000691944,0.00003550605,0.0001010007,0.00001222611],"domain_scores_gemma":[0.9998007,0.00006533058,0.00006095534,0.00002666815,0.0000381744,0.000008256398],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0000634976,0.00003540557,0.0005291702,0.0001134197,0.00001217332,0.0002594922,0.0001035977,0.008744267,0.9678298,0.005349009,0.0002098088,0.01675032],"study_design_scores_gemma":[0.00002922948,0.0008136263,0.003315408,0.00004764299,0.00002137875,0.001179811,0.00007636962,0.2869735,0.6887745,0.003418577,0.01528215,0.0000678266],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6924316,0.0045045,0.2893382,0.0004443749,0.0002463931,0.0001290589,0.0001489961,0.0006385639,0.01211832],"genre_scores_gemma":[0.9468722,0.0006543444,0.0504116,0.00005870013,0.00004448392,0.00004463597,0.00004337085,0.00003015259,0.001840491],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008255466,"threshold_uncertainty_score":0.002761781,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01038253119163332,"score_gpt":0.2076390379946829,"score_spread":0.1972565068030496,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}