{"id":"W1984274279","doi":"10.1063/1.2037947","title":"High-throughput resistivity apparatus for thin-film combinatorial libraries","year":2005,"lang":"en","type":"article","venue":"Review of Scientific Instruments","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":20,"is_retracted":false,"has_abstract":true,"ca_institutions":"Dalhousie University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Electrical resistivity and conductivity; Materials science; Van der Pauw method; Temperature coefficient; Thin film; Sputter deposition; Sputtering; Composite material; Electrical engineering; Nanotechnology; Hall effect","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.002292296,0.000202359,0.0005570439,0.00006175217,0.0003841036,0.0002345272,0.0006077329,0.00007963547,0.00110637],"category_scores_gemma":[0.0004807542,0.0001524909,0.0001997823,0.0002954776,0.0005894661,0.0006675716,0.0002418506,0.00009443262,0.0001974046],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008887411,"about_ca_system_score_gemma":0.000210777,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003978075,"about_ca_topic_score_gemma":0.000009485317,"domain_scores_codex":[0.9975322,0.0001295298,0.0007374618,0.0006483151,0.0005598983,0.0003925172],"domain_scores_gemma":[0.9984228,0.0001117905,0.0003420952,0.0007439883,0.0002707764,0.0001085227],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"not_applicable","study_design_gemma":"not_applicable","study_design_scores_codex":[0.0004751644,0.002516069,0.0006050335,0.03357066,0.0001175588,0.000002794812,0.0008399109,0.000028257,0.1984679,0.2316103,0.2962862,0.2354802],"study_design_scores_gemma":[0.001215668,0.0001898643,0.0003279586,0.004610761,0.00009002837,0.000004032007,0.00002865606,0.0003288288,0.4788937,0.008640707,0.5052871,0.0003826793],"study_design_candidate":"not_applicable","study_design_consensus":"not_applicable","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9815254,0.004533522,0.00005261412,0.001104937,0.009722408,0.001210707,0.0003443024,0.00006501114,0.001441113],"genre_scores_gemma":[0.9908383,0.0009134897,0.006563874,0.0002805507,0.0002684573,0.00007110254,0.00007229405,0.00001533723,0.0009765794],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2804258,"threshold_uncertainty_score":0.9998068,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02059520625959138,"score_gpt":0.2766120540725946,"score_spread":0.2560168478130032,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}