{"id":"W1985352398","doi":"10.1143/jjap.50.038002","title":"Origin of Etch Hillocks Formed on On-Axis SiC(0001) Surfaces by Molten KOH Etching","year":2011,"lang":"en","type":"article","venue":"Japanese Journal of Applied Physics","topic":"Silicon Carbide Semiconductor Technologies","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Alberta Innovates - Health Solutions","keywords":"Hillock; Etching (microfabrication); Materials science; Basal plane; Substrate (aquarium); Dislocation; Crystallography; Etch pit density; Composite material; Enhanced Data Rates for GSM Evolution; Chemistry; Geology","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002089843,0.0002828163,0.0005015184,0.0001306976,0.00004042259,0.00001704345,0.0005081512,0.0001410738,0.00003113644],"category_scores_gemma":[0.0000319025,0.000234112,0.0001542775,0.0003046058,0.00008683392,0.0002077466,0.00003757476,0.0005841096,0.00002151267],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001083729,"about_ca_system_score_gemma":0.0000220749,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002221265,"about_ca_topic_score_gemma":0.000001353143,"domain_scores_codex":[0.9985608,0.00001238633,0.000540496,0.0001628582,0.0004055062,0.0003179362],"domain_scores_gemma":[0.9989623,0.0001885131,0.0002928501,0.0003745521,0.00009209142,0.00008965397],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001523756,0.0001423467,0.0003973088,0.00004831463,0.0001769275,0.000006216299,0.00419109,0.02592196,0.9582213,0.00242469,0.0008030749,0.007514442],"study_design_scores_gemma":[0.000804287,0.000322061,0.0004131314,0.0000652459,0.00003607811,0.00001362806,0.002496329,0.002844116,0.984542,0.008000778,0.0001573445,0.0003049922],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9841715,0.00005040755,0.00003297265,0.00001477405,0.0002028566,0.0001383182,0.000009825706,0.0001711606,0.01520824],"genre_scores_gemma":[0.9992536,0.00004253701,0.0004917093,0.00005005541,0.00008911067,0.000007015802,0.000002110756,0.00005507867,0.00000875938],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02632075,"threshold_uncertainty_score":0.954681,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02573210024208968,"score_gpt":0.229108728833857,"score_spread":0.2033766285917673,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}