{"id":"W1985735120","doi":"10.4028/www.scientific.net/msf.527-529.135","title":"Challenges in Large-Area Multi-Wafer SiC Epitaxy for Production Needs","year":2006,"lang":"en","type":"article","venue":"Materials science forum","topic":"Silicon Carbide Semiconductor Technologies","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"Infineon Technologies (Canada)","funders":"","keywords":"Wafer; Epitaxy; Materials science; Homogeneity (statistics); Optoelectronics; Doping; Engineering physics; Nanotechnology; Computer science; Layer (electronics); Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00902343,0.0004446926,0.001003203,0.0007052376,0.001193836,0.002549845,0.002806909,0.002514128,0.01321971],"category_scores_gemma":[0.007347676,0.0004599768,0.0005413009,0.001213847,0.0008023703,0.004735728,0.001627052,0.001758328,0.005285135],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.001208629,"about_ca_system_score_gemma":0.002386854,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002006055,"about_ca_topic_score_gemma":0.003612061,"domain_scores_codex":[0.9984323,0.0002615961,0.0000928478,0.000224027,0.0007893782,0.0001998528],"domain_scores_gemma":[0.9928898,0.003924407,0.000446232,0.0006103261,0.001466812,0.0006623883],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0006538001,0.0006770397,0.007699209,0.003401045,0.000108793,0.001604052,0.001397426,0.02211569,0.1581028,0.08371472,0.09233855,0.6281869],"study_design_scores_gemma":[0.000265754,0.001739482,0.02852305,0.0009795399,0.00007743025,0.003365294,0.007947966,0.06999551,0.05440595,0.1091288,0.7233384,0.0002328136],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.4121654,0.07787752,0.2463702,0.1611086,0.002912849,0.001227258,0.002410828,0.004788249,0.09113914],"genre_scores_gemma":[0.4940287,0.02693802,0.4481593,0.004325797,0.001385123,0.000839122,0.002160225,0.001175516,0.02098822],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01321971,"threshold_uncertainty_score":0.04772103,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.04465026361518819,"score_gpt":0.2548459181716077,"score_spread":0.2101956545564195,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}