{"id":"W1985915218","doi":"10.1007/s11664-007-0336-9","title":"Scanning Ion Probe Studies of Silicon Implantation Profiles in AlGaN/GaN HEMT Heterostructures","year":2007,"lang":"en","type":"article","venue":"Journal of Electronic Materials","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":3,"is_retracted":false,"has_abstract":false,"ca_institutions":"","funders":"Office of Naval Research; Australian Research Council; Ontario Ministry of Natural Resources and Forestry","keywords":"High-electron-mobility transistor; Ohmic contact; Heterojunction; Materials science; Optoelectronics; Ion implantation; Silicon; Transistor; Semiconductor; Ion; Nanotechnology; Chemistry; Layer (electronics); Electrical engineering; Voltage","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001243448,0.0001773588,0.0001766035,0.000215546,0.0002229304,0.0002853041,0.0002674805,0.0002797217,0.001323608],"category_scores_gemma":[0.0002243584,0.0001668789,0.0001485269,0.0002528799,0.0002483657,0.0002978812,0.0001641712,0.0002235875,0.0002069816],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003128236,"about_ca_system_score_gemma":0.0001617377,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001685376,"about_ca_topic_score_gemma":0.001844047,"domain_scores_codex":[0.9999491,0.000004195517,0.000002746988,0.000011435,0.00001853106,0.00001400997],"domain_scores_gemma":[0.9998052,0.00007868917,0.00003774713,0.00001311739,0.00004856192,0.00001671345],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0003117081,0.00002036005,0.001100596,0.00002957348,0.0000069749,0.0001014178,0.000106235,0.0004261387,0.9963154,0.0001625963,0.00006107331,0.001358005],"study_design_scores_gemma":[0.00003083234,0.0004451965,0.02010838,0.000008003982,0.00001661441,0.0002739441,0.0002699051,0.005043605,0.9729484,0.0001099534,0.0007352836,0.000009965848],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9979609,0.0001691733,0.0005659008,0.00002717994,0.000004009745,0.000006143179,0.0001164826,0.00002182699,0.001128257],"genre_scores_gemma":[0.9979743,0.0001370214,0.0005899106,0.00001648474,0.000003131614,0.000006882449,0.000106448,0.000008519002,0.001157327],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001685376,"threshold_uncertainty_score":0.00442791,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01530409765518108,"score_gpt":0.2992527406492806,"score_spread":0.2839486429940996,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}