{"id":"W1987040379","doi":"10.1063/1.1387262","title":"Quantitative surface stress measurements using a microcantilever","year":2001,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":99,"is_retracted":false,"has_abstract":true,"ca_institutions":"Acadia University; McGill University","funders":"","keywords":"Cantilever; Deflection (physics); Surface stress; Materials science; Modulus; Silicon nitride; Calibration; Young's modulus; Stress (linguistics); Silicon; Composite material; Optics; Optoelectronics; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005973411,0.0009235409,0.0005847605,0.0007794102,0.0004206761,0.0005234662,0.0008646144,0.000924357,0.002237851],"category_scores_gemma":[0.0007369407,0.0003245757,0.0002301334,0.0005204908,0.0004239629,0.0006901369,0.0005448662,0.001044312,0.0009890539],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003396259,"about_ca_system_score_gemma":0.0001829253,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003712306,"about_ca_topic_score_gemma":0.0006153091,"domain_scores_codex":[0.9987985,0.0001100169,0.0000476328,0.0002796336,0.0006898431,0.00007429095],"domain_scores_gemma":[0.9993857,0.0001866105,0.00007487079,0.0001212385,0.0001909934,0.00004065366],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000122816,0.000009647603,0.00008693821,0.00004200042,0.000004138807,0.00001370427,0.00002125824,0.0001002531,0.9918191,0.0002631355,0.0001489164,0.007478501],"study_design_scores_gemma":[0.000008858231,0.0002532834,0.003379568,0.00001209702,0.00001242154,0.000164693,0.00004351895,0.007346496,0.9829115,0.0006993252,0.005142977,0.00002521991],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"methods","genre_scores_codex":[0.3251124,0.007186354,0.6531256,0.0005690577,0.0007484033,0.0003817752,0.002141709,0.003185791,0.007548874],"genre_scores_gemma":[0.6536404,0.004443001,0.3295789,0.0003537298,0.000283356,0.0007560941,0.001375643,0.0002768974,0.009291914],"genre_candidate":"methods","genre_consensus":"methods","teacher_disagreement_score":0.002237851,"threshold_uncertainty_score":0.007486403,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.04294779124080263,"score_gpt":0.2994032785625999,"score_spread":0.2564554873217972,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}