{"id":"W1987363894","doi":"10.1116/1.1329124","title":"Efficient modeling of thin film deposition for low sticking using a three-dimensional microstructural simulator","year":2001,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":21,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta; Carleton University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Deposition (geology); Monte Carlo method; Normalization (sociology); Materials science; Thin film; Sticking coefficient; Diffusion; Feature (linguistics); Physical vapor deposition; Simulation; Computer science; Computational science; Nanotechnology; Chemistry; Thermodynamics; Physics; Geology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001521693,0.0002043803,0.0004682843,0.0005070016,0.0005143066,0.00009617224,0.0005268617,0.00018594,0.00004091268],"category_scores_gemma":[0.0002117943,0.0001442265,0.0001287611,0.0006112897,0.0008553464,0.0002923517,0.0002354337,0.0002546456,8.063334e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008253026,"about_ca_system_score_gemma":0.0002600577,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000506669,"about_ca_topic_score_gemma":0.00001066462,"domain_scores_codex":[0.9978779,0.00002570512,0.0007826916,0.000391957,0.0004483132,0.0004734265],"domain_scores_gemma":[0.9982052,0.0001384376,0.0005582104,0.0002433432,0.0007404961,0.0001142913],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0001071023,0.00004968019,0.001150199,0.00002430172,0.000006785679,0.000006176989,0.000116517,0.3755252,0.6227725,0.0001029615,0.000002150998,0.0001364191],"study_design_scores_gemma":[0.0005340631,0.0003335532,0.0003324824,0.0002148844,0.00004008993,0.0004464743,0.0003231752,0.8352187,0.1606819,0.001723568,0.000002902543,0.0001482544],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.979064,0.0008384571,0.01876868,0.0003283156,0.0007056912,0.0002394967,0.00002288502,0.00002943074,0.000003085013],"genre_scores_gemma":[0.9698749,0.00001222195,0.03003412,0.00003118163,0.00003127868,0.000001661758,3.952002e-7,0.00001092608,0.000003314871],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.4620907,"threshold_uncertainty_score":0.5881387,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01660217146173231,"score_gpt":0.272232331330958,"score_spread":0.2556301598692257,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}