{"id":"W1987394515","doi":"10.1116/1.1554971","title":"Theoretical and experimental determination of the energy flux during magnetron sputter deposition onto an unbiased substrate","year":2003,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":46,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Cavity magnetron; Sputter deposition; Substrate (aquarium); Deposition (geology); Atom (system on chip); Atomic physics; Flux (metallurgy); High-power impulse magnetron sputtering; Plasma; Materials science; Electron; Copper; Analytical Chemistry (journal); Sputtering; Chemistry; Thin film; Physics; Metallurgy; Nanotechnology; Nuclear physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003434041,0.0002863805,0.0002811985,0.0003652747,0.0005476993,0.0004427947,0.0003803549,0.0004721032,0.001287954],"category_scores_gemma":[0.001032839,0.0002930209,0.0001293245,0.0002363768,0.0005025448,0.0004425735,0.0001661736,0.0002605834,0.0001881505],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0008324347,"about_ca_system_score_gemma":0.0003061943,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001140393,"about_ca_topic_score_gemma":0.001035493,"domain_scores_codex":[0.9997671,0.00001684252,0.000006888346,0.00003459015,0.0001335681,0.00004091551],"domain_scores_gemma":[0.9996902,0.0001895163,0.00002813829,0.0000217943,0.00005949093,0.00001099174],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0005020616,0.00007615922,0.005813415,0.0002516623,0.00002759857,0.0006061901,0.0002573216,0.04818074,0.9139439,0.01702377,0.000414137,0.01290311],"study_design_scores_gemma":[0.00004678619,0.0003296613,0.01867892,0.00004655786,0.00002210504,0.0003761939,0.0002293556,0.2055389,0.7701157,0.002364142,0.002202251,0.00004926409],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9695411,0.000459881,0.01853774,0.0001082076,0.00001678465,0.00002859045,0.0001508917,0.0001453474,0.01101145],"genre_scores_gemma":[0.9961442,0.0002003549,0.002824505,0.00001138811,0.00000255106,0.00002846232,0.00009864031,0.00002077274,0.0006691756],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001287954,"threshold_uncertainty_score":0.006039798,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004718870938671864,"score_gpt":0.2039550120736743,"score_spread":0.1992361411350024,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}