{"id":"W1987518971","doi":"10.1088/0960-1317/21/7/075023","title":"A large-stroke electrostatic micro-actuator","year":2011,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":46,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Windsor; University of Waterloo; University of Toronto","funders":"","keywords":"Actuator; Cantilever; Voltage; Microelectromechanical systems; Materials science; Capacitor; Beam (structure); Electrode; Control theory (sociology); Electrical engineering; Physics; Engineering; Optoelectronics; Structural engineering; Computer science; Composite material; Control (management)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001415126,0.0001927892,0.0002921163,0.0002420651,0.00003663477,0.0000199178,0.0001666251,0.00009363025,0.00001754721],"category_scores_gemma":[0.00001966778,0.0001797624,0.00008693231,0.0001184295,0.00001314481,0.0001639143,0.00004302459,0.0003466062,0.00000316603],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004851921,"about_ca_system_score_gemma":0.00001192379,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":6.948762e-7,"about_ca_topic_score_gemma":0.000001326389,"domain_scores_codex":[0.9991173,0.000002221211,0.0003533039,0.00009726876,0.000073052,0.0003569087],"domain_scores_gemma":[0.9996245,0.00001586533,0.00008861632,0.0001235103,0.00005579281,0.00009169937],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000009516662,0.00001690655,0.000003883506,0.00005729358,0.00006432005,0.0000418676,0.0003589839,0.00002244761,0.9965267,0.0002600622,0.0001868406,0.002451226],"study_design_scores_gemma":[0.0005193304,0.0001668154,0.00005108691,0.00009199716,0.00003511606,0.0006227772,0.0003436897,0.0005478054,0.986979,0.0006956828,0.009721163,0.0002255472],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9298592,0.005371581,0.06411038,0.00001149041,0.0003785345,0.00006530857,0.0000143906,0.0001304917,0.00005860206],"genre_scores_gemma":[0.9328246,0.004907412,0.06207133,0.00002859944,0.0000561415,0.000002578876,7.715026e-7,0.00006133516,0.00004729212],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.009547663,"threshold_uncertainty_score":0.7330499,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007321443231510743,"score_gpt":0.1756051845418995,"score_spread":0.1682837413103888,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}