{"id":"W1988033727","doi":"10.1088/0960-1317/12/6/317","title":"Theoretical limits on the freestanding length of cantilevers produced by surface micromachining technology","year":2002,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":25,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Surface micromachining; Cantilever; Materials science; Nanotechnology; Bulk micromachining; Surface (topology); Microelectromechanical systems; Optoelectronics; Engineering; Composite material; Fabrication; Geometry; Mathematics; Medicine","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002314185,0.0002087183,0.0003293516,0.0002039867,0.00006264367,0.00002004981,0.0002742157,0.0001368133,0.00002156148],"category_scores_gemma":[0.00009775377,0.0001556309,0.00006982649,0.0002579386,0.00008369902,0.00007782739,0.0000448743,0.0005749183,0.000001057926],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005335438,"about_ca_system_score_gemma":0.000004913239,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":5.496781e-7,"about_ca_topic_score_gemma":2.723267e-7,"domain_scores_codex":[0.9990662,0.000005933772,0.0003886667,0.000131764,0.0001146639,0.0002927365],"domain_scores_gemma":[0.9994609,0.0001036766,0.0001321989,0.0001970863,0.00005696963,0.00004920083],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000005952347,0.00001811252,0.000004608454,0.00003817087,0.00006532468,0.00001090752,0.0001095198,0.001334175,0.9873207,0.007823457,0.0006799313,0.002589108],"study_design_scores_gemma":[0.000297831,0.0001746836,0.000002851736,0.0002337371,0.0000251151,0.0001718993,0.0002755522,0.006586805,0.9898626,0.0006011707,0.001599298,0.0001684779],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9889016,0.006806074,0.003342093,0.0004242327,0.000266774,0.0001007056,0.00001507211,0.00009511279,0.00004836543],"genre_scores_gemma":[0.9928467,0.004439174,0.002618704,0.00001497509,0.00002558542,0.000001173013,2.824623e-7,0.00004290191,0.0000105349],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.007222286,"threshold_uncertainty_score":0.6346444,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006683428509191331,"score_gpt":0.1705764769562932,"score_spread":0.1638930484471018,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}