{"id":"W1988128288","doi":"10.1016/j.physb.2005.12.011","title":"Hydrogen/Deuterium-defect complexes involved in the ion cutting of Si (001) at the sub-100nm scale","year":2006,"lang":"en","type":"article","venue":"Physica B Condensed Matter","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":false,"ca_institutions":"Western University; Université de Montréal; Institut National de la Recherche Scientifique","funders":"","keywords":"Raman spectroscopy; Deuterium; Silicon; Ion; Materials science; Exfoliation joint; Hydrogen; Chemical physics; Crystallography; Nanotechnology; Chemistry; Optoelectronics; Atomic physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002075011,0.0002196076,0.0002608504,0.0001621968,0.0004665107,0.0005856943,0.0005989305,0.0004582262,0.002785495],"category_scores_gemma":[0.0002804448,0.0002215017,0.0001226478,0.0001390227,0.0004657038,0.0004058846,0.0004194069,0.0004168069,0.0002645694],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005693221,"about_ca_system_score_gemma":0.0001716735,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001019068,"about_ca_topic_score_gemma":0.0009689854,"domain_scores_codex":[0.9999037,0.00001073051,0.000004296409,0.00002024198,0.00002324879,0.00003776201],"domain_scores_gemma":[0.9998708,0.00005383368,0.00002486028,0.00001765159,0.00001292838,0.0000198994],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.001552853,0.00009998804,0.002794001,0.0003710782,0.00004845169,0.0007012337,0.000670259,0.003047077,0.9745189,0.007883802,0.0007397553,0.007572555],"study_design_scores_gemma":[0.00008964882,0.0002555068,0.002562734,0.00001150478,0.00002766638,0.0002539341,0.0002963862,0.005721337,0.987369,0.0009670777,0.002427264,0.0000178936],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9962441,0.0001759021,0.001177565,0.00007016634,0.00001553196,0.00001109109,0.00003561124,0.00001995679,0.002250209],"genre_scores_gemma":[0.998458,0.00006550844,0.0005255209,0.00002316065,0.000001711787,0.000004951521,0.00006498216,0.00001187297,0.0008444203],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002785495,"threshold_uncertainty_score":0.009318411,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01003992907608841,"score_gpt":0.2053650132272775,"score_spread":0.1953250841511891,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}