{"id":"W1988748056","doi":"10.1557/proc-1012-y03-02","title":"Room Temperature Growth of Indium Oxide Films by Reactive Ion Beam Assisted Deposition","year":2007,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"","keywords":"Materials science; Indium; Thin film; Ion beam; Oxide; Optoelectronics; Indium tin oxide; Transparent conducting film; Evaporation; X-ray photoelectron spectroscopy; Amorphous solid; Electron beam physical vapor deposition; Ion beam-assisted deposition; Crystallite; Analytical Chemistry (journal); Optics; Nanotechnology; Chemical engineering; Beam (structure); Metallurgy; Crystallography","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001474214,0.0002452549,0.0003450842,0.0002265253,0.0002168281,0.0003740594,0.000595061,0.0002964796,0.0007712825],"category_scores_gemma":[0.0003056011,0.0002964366,0.0001263641,0.0001702131,0.0001893462,0.0002827262,0.0001797076,0.0005059374,0.0003990189],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003303511,"about_ca_system_score_gemma":0.0002576274,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001002338,"about_ca_topic_score_gemma":0.002402636,"domain_scores_codex":[0.9998959,0.000005741505,0.000006908102,0.00002422507,0.00004610396,0.00002102634],"domain_scores_gemma":[0.9999195,0.00002050108,0.00001663609,0.00001567406,0.00001797403,0.000009556937],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002027396,0.00000390216,0.00003565375,0.00002445187,0.000001373857,0.00002786862,0.00002241528,0.00003837201,0.9991947,0.00006774371,0.00005424036,0.0005089459],"study_design_scores_gemma":[0.000007520784,0.00005512073,0.0006064937,0.000002980443,0.000004483021,0.00007615495,0.00001319708,0.0007583222,0.9971088,0.00002433886,0.001337894,0.000004781408],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9904389,0.001245036,0.003597445,0.0001556091,0.00008065705,0.00002313968,0.0002372742,0.0002295277,0.003992436],"genre_scores_gemma":[0.986564,0.0009692241,0.007880251,0.00003096439,0.00002128249,0.00002686231,0.0002974832,0.00008616739,0.004123693],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001002338,"threshold_uncertainty_score":0.002580225,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004662561363978877,"score_gpt":0.1879633358342829,"score_spread":0.183300774470304,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}