{"id":"W1989286136","doi":"10.1063/1.1538313","title":"Characterization of neutral, positive, and negative species in a chlorine high-density surface-wave plasma","year":2003,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Plasma Diagnostics and Applications","field":"Engineering","cited_by":13,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National de la Recherche Scientifique; Université de Montréal","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Ion; Chemistry; Plasma; Torr; Atomic physics; Dissociation (chemistry); Electron; Chlorine; Diffusion; Analytical Chemistry (journal); Thermodynamics; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002968906,0.0002118353,0.0002025514,0.0002763807,0.0002551937,0.000393278,0.0003815501,0.0003935103,0.0008179967],"category_scores_gemma":[0.0005140329,0.0001313801,0.0001189503,0.0001644183,0.0004437056,0.0004105385,0.0003003227,0.0002991391,0.00009656337],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002584521,"about_ca_system_score_gemma":0.0001342127,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006450757,"about_ca_topic_score_gemma":0.0004743944,"domain_scores_codex":[0.9998223,0.00002411449,0.000004618657,0.00003166397,0.00008939684,0.00002794669],"domain_scores_gemma":[0.999741,0.0001037366,0.00004986379,0.00001571316,0.00006454017,0.00002513136],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000103936,0.000008139518,0.0004534141,0.00002957846,0.000002494062,0.00004829218,0.00006577621,0.00007662024,0.998086,0.00008978948,0.00001310045,0.001022797],"study_design_scores_gemma":[0.00002721796,0.000334194,0.003207973,0.000004348155,0.000007357078,0.0001664617,0.00008283141,0.001663122,0.9938501,0.0001129024,0.0005353312,0.000008017028],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9961466,0.0002794644,0.00282137,0.00004026457,0.000003891985,0.00001344633,0.00004003213,0.00001978763,0.000635205],"genre_scores_gemma":[0.9983611,0.0001053448,0.0009939044,0.0000186693,0.000003561373,0.00001131608,0.00005903995,0.000008778293,0.0004383529],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008179967,"threshold_uncertainty_score":0.002736449,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01065946559419847,"score_gpt":0.1824483190504109,"score_spread":0.1717888534562124,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}