{"id":"W1989547031","doi":"10.1117/12.718185","title":"Successful MWIR FPA fabrication using gas cluster ion-beam InSb surface finishing","year":2007,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Advanced Semiconductor Detectors and Materials","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Lockheed Martin (Canada)","funders":"","keywords":"Materials science; Optoelectronics; Fabrication; Etching (microfabrication); Focused ion beam; Optics; Nanotechnology; Ion; Chemistry; Layer (electronics); Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0009344177,0.0004034628,0.0004815149,0.0001180524,0.0001120016,0.00015647,0.0007845651,0.0002685777,0.00001833023],"category_scores_gemma":[0.0004314939,0.0003688977,0.0004276833,0.0003781236,0.0001457082,0.0009938891,0.0001620856,0.0003447763,0.000002060156],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003320163,"about_ca_system_score_gemma":0.00002191096,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001859101,"about_ca_topic_score_gemma":4.376565e-7,"domain_scores_codex":[0.9974815,1.688923e-8,0.0009213162,0.0003811943,0.0005985961,0.0006174361],"domain_scores_gemma":[0.9980525,0.0001930032,0.0003401243,0.00008185329,0.001178848,0.0001536957],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005746977,0.000043738,0.0004678657,0.0005140588,0.0002182172,1.087267e-7,0.0002446918,0.006754218,0.9762939,0.01450206,0.0006724199,0.0002312612],"study_design_scores_gemma":[0.0007567006,0.00009964072,0.0005309014,0.000291577,0.0001045837,0.00001711489,0.0009724416,0.05532245,0.9388015,0.0007757319,0.001841309,0.0004860585],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9963459,0.0001505799,0.0007637523,0.0001487018,0.0009214806,0.0005263137,0.00004620231,0.0002393301,0.00085771],"genre_scores_gemma":[0.9258533,0.0001007687,0.07301951,0.0000584161,0.0007517175,0.00002991467,0.00001167443,0.0001190875,0.00005557717],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.07225576,"threshold_uncertainty_score":0.9998763,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01342975533719677,"score_gpt":0.2389939030349953,"score_spread":0.2255641476977985,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}