{"id":"W1989569615","doi":"10.1063/1.2349565","title":"Pulsed radio frequency plasma deposition of a-SiNx:H alloys: Film properties, growth mechanism, and applications","year":2006,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":40,"is_retracted":false,"has_abstract":true,"ca_institutions":"Polytechnique Montréal; Regroupement Québécois sur les Matériaux de Pointe","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Plasma-enhanced chemical vapor deposition; Elastic recoil detection; Ellipsometry; Thin film; Optoelectronics; Chemical vapor deposition; Photoluminescence; Duty cycle; Analytical Chemistry (journal); Substrate (aquarium); Nanotechnology; Chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007155019,0.0001545795,0.000280767,0.00008667554,0.00004677996,0.00002108885,0.0001837669,0.0001058964,0.000002142699],"category_scores_gemma":[0.000002495655,0.0001426207,0.00006625688,0.000199872,0.00007016151,0.0001482263,0.00001266485,0.0002558889,0.000001930238],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000813338,"about_ca_system_score_gemma":0.00002629605,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001186691,"about_ca_topic_score_gemma":0.00000436444,"domain_scores_codex":[0.9991243,0.000005940363,0.0004170575,0.00009838781,0.0002054684,0.0001488721],"domain_scores_gemma":[0.9995192,0.00002173336,0.0001816566,0.0001542165,0.00008865626,0.00003455588],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002483623,0.00007950859,0.00002413641,0.0001847004,0.00007482895,0.000002696485,0.0001286904,0.02555292,0.9102395,0.06160747,0.0001828256,0.001897901],"study_design_scores_gemma":[0.0005981195,0.00006386216,0.0001949291,0.00005471264,0.00009742811,0.00003012217,0.0000969641,0.006336773,0.9033413,0.08885781,0.0001282576,0.0001997255],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8305011,0.0007238829,0.1638769,0.0000378302,0.0001291074,0.000465345,0.0000285106,0.0002982059,0.003939121],"genre_scores_gemma":[0.9871391,0.0001007436,0.0125374,0.000007213257,0.0001438771,0.00002737941,0.000005021316,0.00003462431,0.000004663353],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.156638,"threshold_uncertainty_score":0.5815902,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006963962444591422,"score_gpt":0.1649717758244608,"score_spread":0.1580078133798694,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}