{"id":"W1990049102","doi":"10.1116/1.3478304","title":"Direct-write electron beam lithography in silicon dioxide at low energy","year":2010,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Electron and X-Ray Spectroscopy Techniques","field":"Materials Science","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Sherbrooke","funders":"Natural Sciences and Engineering Research Council of Canada; Fonds Québécois de la Recherche sur la Nature et les Technologies","keywords":"Electron-beam lithography; Materials science; Lithography; Silicon; Silicon dioxide; Electron; Cathode ray; Fabrication; Hydrofluoric acid; Silicon on insulator; Monte Carlo method; Optoelectronics; Resist; Nanotechnology; Composite material; Physics; Nuclear physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001396291,0.0002021306,0.0001883119,0.00009334386,0.0001308042,0.0002543911,0.0002284799,0.0002290769,0.0008521167],"category_scores_gemma":[0.0003703817,0.0001269767,0.00008886788,0.0001253066,0.0002381236,0.0001905617,0.0002557588,0.0001762525,0.0002680488],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001564531,"about_ca_system_score_gemma":0.0001257836,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00032876,"about_ca_topic_score_gemma":0.0007678245,"domain_scores_codex":[0.999898,0.0000101333,0.000005671666,0.00001728169,0.00005440245,0.00001452175],"domain_scores_gemma":[0.9997563,0.0001325399,0.00003685994,0.00002637454,0.00003579146,0.00001218016],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004195757,0.00001164486,0.0004054363,0.00008815093,0.000003762941,0.0001723964,0.00002960757,0.0006992149,0.9959799,0.0002649823,0.00004602415,0.002256827],"study_design_scores_gemma":[0.0000154936,0.0001549306,0.002546754,0.000006266276,0.000004819931,0.0002023604,0.00002413867,0.003832266,0.9921813,0.00008239618,0.000943294,0.00000599531],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9906494,0.0008150623,0.00541321,0.00003959063,0.00001320011,0.00001425938,0.00008484517,0.00007472494,0.002895667],"genre_scores_gemma":[0.9894468,0.0005075998,0.006859398,0.00001922243,0.000004297308,0.00001346665,0.0001161392,0.00001879706,0.003014366],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008521167,"threshold_uncertainty_score":0.002850592,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006278368296310938,"score_gpt":0.2308080400003228,"score_spread":0.2245296717040119,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}