{"id":"W1990555761","doi":"10.1117/12.567446","title":"Trench isolated rib waveguides on silicon-on-insulator","year":2004,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institute for Microstructural Sciences; McMaster University; Carleton University","funders":"","keywords":"Trench; Silicon on insulator; Planar; Materials science; Wafer; Fabrication; Optoelectronics; Waveguide; Beam propagation method; Silicon; Photonic integrated circuit; Silicon photonics; Optics; Photonics; Electronic circuit; CMOS; Electrical engineering; Nanotechnology; Engineering; Refractive index; Physics; Computer science","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001077233,0.0003516432,0.0002871356,0.0001627944,0.0002049586,0.0003222764,0.0006377003,0.0003268328,0.001189844],"category_scores_gemma":[0.0002408042,0.0003575353,0.000261521,0.0002294262,0.0002437378,0.0003329253,0.0004465873,0.0004736593,0.0006610249],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004836554,"about_ca_system_score_gemma":0.0003372295,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001241589,"about_ca_topic_score_gemma":0.003849398,"domain_scores_codex":[0.9998147,0.0000125566,0.000006478041,0.00005427987,0.00008016584,0.00003187244],"domain_scores_gemma":[0.9998023,0.00004207937,0.00005736372,0.00004083217,0.00004018755,0.00001733445],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004874449,0.00002702107,0.0002886715,0.0000862227,0.00001290246,0.0001310063,0.00004787436,0.005443051,0.9900578,0.0005699013,0.000130824,0.003156058],"study_design_scores_gemma":[0.00003191763,0.0004891549,0.003417928,0.00002342893,0.00002340778,0.0001710652,0.00005207839,0.04458483,0.947145,0.0003763595,0.003659523,0.00002525171],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9496096,0.0007962167,0.03954926,0.00006214318,0.00008473374,0.00006357877,0.0004684825,0.0008119121,0.008553967],"genre_scores_gemma":[0.9475383,0.0006180811,0.04684622,0.00004231139,0.00001304967,0.00006472973,0.000375819,0.00008887013,0.004412586],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001241589,"threshold_uncertainty_score":0.003980458,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009727411951080508,"score_gpt":0.2191871010316972,"score_spread":0.2094596890806167,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}