{"id":"W1990603427","doi":"10.1088/1674-1056/22/5/055204","title":"Synthesis of TiN/a-Si<sub>3</sub>N<sub>4</sub>thin film by using a Mather type dense plasma focus system","year":2013,"lang":"en","type":"article","venue":"Chinese Physics B","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"University of Saskatchewan","keywords":"X-ray photoelectron spectroscopy; Materials science; Titanium nitride; Tin; Silicon nitride; Scanning electron microscope; Thin film; Crystallite; Analytical Chemistry (journal); Silicon; Nitride; Diffraction; Surface roughness; Nanotechnology; Chemical engineering; Optoelectronics; Composite material; Optics; Layer (electronics); Metallurgy; Chemistry","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001107071,0.0003470396,0.0003090435,0.0003674951,0.0003053906,0.0001518806,0.0003394131,0.0002149628,0.002790583],"category_scores_gemma":[0.0001288112,0.0002613717,0.0002232615,0.0002862296,0.0001032857,0.000240561,0.0001679266,0.0002673793,0.0005750895],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003324515,"about_ca_system_score_gemma":0.0003275531,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001168603,"about_ca_topic_score_gemma":0.002530443,"domain_scores_codex":[0.9999394,0.0000025779,0.000004317441,0.00001858741,0.00002802606,0.00000703532],"domain_scores_gemma":[0.9999398,0.000006929415,0.000008014135,0.000006882884,0.00003075967,0.000007689323],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001304206,0.000005239551,0.0001072395,0.00007159081,0.00000438171,0.00005689993,0.00001267077,0.00008560407,0.9966966,0.0001321586,0.0001168926,0.00269763],"study_design_scores_gemma":[0.00001870789,0.000110434,0.001621899,0.000005511655,0.00001805585,0.0002504024,0.00002927192,0.002664139,0.9896729,0.00008514759,0.005516133,0.000007415866],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9092788,0.001956202,0.07148321,0.0001542519,0.0002061551,0.0003367514,0.001719959,0.001136438,0.0137283],"genre_scores_gemma":[0.8203129,0.001897608,0.1644612,0.00007434891,0.00004052938,0.0002988331,0.001253876,0.0001490793,0.01151169],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002790583,"threshold_uncertainty_score":0.009335399,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0094240247071243,"score_gpt":0.1891056714187409,"score_spread":0.1796816467116166,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}