{"id":"W1990824906","doi":"10.1007/s00542-011-1248-4","title":"Low resistive silicon substrate as an etch-stop layer for drilling thick SiO2 by spark assisted chemical engraving (SACE)","year":2011,"lang":"en","type":"article","venue":"Microsystem Technologies","topic":"Advanced Machining and Optimization Techniques","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":false,"ca_institutions":"Concordia University","funders":"Soochow University","keywords":"Silicon; Layer (electronics); Materials science; Engraving; Substrate (aquarium); Resistive touchscreen; Scanning electron microscope; Optoelectronics; Etching (microfabrication); Surface micromachining; Composite material; Electrical engineering; Fabrication","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0002591435,0.0003524296,0.0004015389,0.0001538663,0.0001653292,0.00007159364,0.0004691269,0.0006035785,0.000007646321],"category_scores_gemma":[0.0001953795,0.0003343142,0.00009231865,0.0002357388,0.0001197582,0.0002235848,0.00007423582,0.0004088325,0.00001089057],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001272916,"about_ca_system_score_gemma":0.00001813585,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002794776,"about_ca_topic_score_gemma":0.00001461753,"domain_scores_codex":[0.998503,0.00002271481,0.0004357163,0.0004609575,0.0001244477,0.0004531791],"domain_scores_gemma":[0.999052,0.0001198709,0.0001311816,0.000516143,0.0001295683,0.00005126001],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004823486,0.00005747164,0.0001933445,0.0003612075,0.00005740835,0.000007399478,0.0006997094,0.0007926553,0.9891221,0.001562807,0.0009511664,0.006146476],"study_design_scores_gemma":[0.0002672859,0.00009198139,0.00002521763,0.0002730792,0.00002237351,0.0000140956,0.00158036,0.004911611,0.9898368,0.001626342,0.0009213606,0.000429471],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6844631,0.001383107,0.2953391,0.00005544917,0.0002311791,0.0008594935,0.0001249613,0.01622494,0.001318602],"genre_scores_gemma":[0.9392995,0.0001312623,0.06005304,0.0000176912,0.00001959374,0.0001889211,0.0000576618,0.000087325,0.0001449589],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2548364,"threshold_uncertainty_score":0.9999109,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02123640390913612,"score_gpt":0.2467310597643563,"score_spread":0.2254946558552202,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}