{"id":"W1991112393","doi":"10.1109/nano.2011.6144494","title":"Ultrathin titanium passive devices fabrication","year":2011,"lang":"en","type":"article","venue":"","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Sherbrooke","funders":"","keywords":"Chemical-mechanical planarization; Titanium; Materials science; Fabrication; Capacitor; Silicon; Optoelectronics; Electrical resistivity and conductivity; Realization (probability); Metal; Nanotechnology; Electronic engineering; Electrical engineering; Metallurgy; Layer (electronics); Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001179367,0.0004702243,0.0003538929,0.0002919237,0.0003231705,0.0005507699,0.0009871898,0.0006158049,0.002502277],"category_scores_gemma":[0.0002980681,0.0002907875,0.0003061631,0.0002767483,0.0002303617,0.0006841981,0.000570871,0.0005264044,0.001166005],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004656791,"about_ca_system_score_gemma":0.0002996892,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006231932,"about_ca_topic_score_gemma":0.001211428,"domain_scores_codex":[0.999786,0.000007168184,0.00001206295,0.0000578155,0.0001051131,0.00003194422],"domain_scores_gemma":[0.9998732,0.00002401229,0.00002774392,0.00002813112,0.00003541308,0.0000115077],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001775721,0.000009418211,0.00009911528,0.0001513956,0.00001048091,0.0000881632,0.00005259296,0.0003243595,0.9915256,0.001103383,0.0003835933,0.006234141],"study_design_scores_gemma":[0.00001283064,0.0001484749,0.0007598489,0.00002013571,0.00002248045,0.0003427907,0.00007839254,0.002150791,0.9701889,0.000372143,0.02588482,0.00001852167],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6983071,0.007906209,0.2264871,0.0009172233,0.001788044,0.0005459802,0.003633013,0.001856465,0.05855896],"genre_scores_gemma":[0.8205737,0.00509506,0.1519471,0.0002789033,0.00009169475,0.0003860088,0.001635669,0.0001989958,0.01979289],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002502277,"threshold_uncertainty_score":0.008370876,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0253827046810861,"score_gpt":0.200021464974989,"score_spread":0.1746387602939029,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}