{"id":"W1991566825","doi":"10.1063/1.1856131","title":"Selective surface modification and patterning by a micro-plasma discharge","year":2005,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":16,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Scanning electron microscope; Photolithography; Monolayer; Microstructure; Plasma; Materials science; Self-assembled monolayer; Argon; Electrode; Plasma etching; Surface modification; Plasma cleaning; Copper; Optical microscope; Nanotechnology; Analytical Chemistry (journal); Optoelectronics; Chemistry; Etching (microfabrication); Composite material; Layer (electronics); Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001067729,0.0002264769,0.0002365263,0.000130652,0.0001617729,0.0002269518,0.0004491861,0.0002939933,0.000946883],"category_scores_gemma":[0.0001938182,0.0002194086,0.0002028788,0.00009277858,0.0002065213,0.000201603,0.0002915065,0.0003257453,0.0004087795],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001659457,"about_ca_system_score_gemma":0.0001244664,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002205008,"about_ca_topic_score_gemma":0.0003226477,"domain_scores_codex":[0.9998081,0.00001327671,0.000009980878,0.00005163738,0.0000866383,0.00003037424],"domain_scores_gemma":[0.9999135,0.00002374769,0.00001852789,0.00002220916,0.00001324563,0.00000890828],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000009474865,0.000005550589,0.00006477298,0.00002456468,0.000002158455,0.00003204707,0.000009941854,0.00002921221,0.9973636,0.00008506423,0.00005436085,0.002319113],"study_design_scores_gemma":[0.000003208606,0.00003028459,0.0005360401,7.63059e-7,0.000002342841,0.0002282671,0.000003656663,0.000389488,0.9973442,0.00002605422,0.001433396,0.000002286126],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9296356,0.002108473,0.06282735,0.0002915465,0.0001517611,0.0001090409,0.0003482964,0.0004905045,0.004037423],"genre_scores_gemma":[0.9447199,0.0009751252,0.05054865,0.0001009851,0.00003239926,0.00009652921,0.0002138137,0.00003768113,0.003274877],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.000946883,"threshold_uncertainty_score":0.003167629,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005924812309682386,"score_gpt":0.1984587612620871,"score_spread":0.1925339489524047,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}