{"id":"W1991785250","doi":"10.1117/12.2077033","title":"Rotational MEMS mirror with latching arm for silicon photonics","year":2015,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":21,"is_retracted":false,"has_abstract":true,"ca_institutions":"Active Ethernet Passive Optical Networks Over λ MultipleXing (Canada); Université du Québec à Montréal","funders":"Natural Sciences and Engineering Research Council of Canada; CMC Microsystems","keywords":"Comb drive; Optics; Microelectromechanical systems; Planar; Waveguide; Materials science; Photonics; Rotation (mathematics); Angular displacement; Optoelectronics; Physics; Acoustics; Fabrication; Computer science","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0005799545,0.0003693702,0.0004555503,0.00008859877,0.00007181452,0.0001216503,0.0007387753,0.0001995017,0.000009246303],"category_scores_gemma":[0.0003478239,0.0002955,0.0004437721,0.0002716995,0.0001734965,0.0006016462,0.00007899162,0.0003166308,0.000002209583],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002219479,"about_ca_system_score_gemma":0.00006146524,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001128182,"about_ca_topic_score_gemma":9.456612e-7,"domain_scores_codex":[0.9978346,8.87572e-9,0.0006122113,0.000351025,0.0007196868,0.0004825137],"domain_scores_gemma":[0.9977646,0.0002143263,0.0001987424,0.0000606117,0.001532829,0.0002288452],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"theoretical_or_conceptual","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.000294236,0.0001803516,0.0002834603,0.00109043,0.0009370631,1.830139e-7,0.0006264676,0.003805992,0.3510021,0.6389206,0.002556619,0.0003025523],"study_design_scores_gemma":[0.003981048,0.0009757983,0.0006816405,0.0005883805,0.0003733288,0.0000376697,0.002974503,0.708592,0.2566669,0.00643447,0.01772296,0.0009713004],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9912935,0.000177359,0.0001700528,0.0008026306,0.0002974736,0.0007933088,0.00008809077,0.0001910291,0.006186584],"genre_scores_gemma":[0.7534698,0.00007064651,0.2451428,0.0001430203,0.0002849559,0.0005314159,0.00003047457,0.0001427814,0.0001840937],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.704786,"threshold_uncertainty_score":0.9999497,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01587274786379929,"score_gpt":0.2327821184477584,"score_spread":0.2169093705839591,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}